Excimer Laser Synchronization via Capacitor Voltage Equalization
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Solution Overview
Problem
The synchronization of pulses from multiple excimer lasers is hindered by temporal jitter due to variations in charging voltage, which cannot be easily corrected without advanced and costly high-voltage power supplies.
Innovation Solution
A switching arrangement connects the storage capacitors of multiple excimer lasers after charging, using IGBT modules to equalize voltages and minimize relative fluctuations, ensuring precise temporal overlap of pulses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If independent high-voltage power supplies are used for each excimer laser, then operational independence and flexibility are improved, but temporal jitter increases due to voltage variations
Solution Approach 1:
The patent merges the storage capacitors of multiple excimer lasers into a common charging system. Instead of using independent power supplies for each laser, the capacitors are charged from a shared high-voltage power supply through individual switching circuits, ensuring synchronized voltage levels and reducing temporal jitter while maintaining operational flexibility.
Solution Approach 2:
The patent introduces individual switching circuits (controlling switches) as intermediaries between the common power supply and each storage capacitor. These switching circuits allow independent control of each laser's discharge timing while sharing the common power source, thus resolving the contradiction between operational independence and temporal synchronization.
2Manufacturing precision
If advanced high-voltage power supplies with precise voltage control are used, then temporal jitter is reduced, but system cost and complexity increase
Solution Approach 1:
The patent segments the power supply function into two parts: a common power supply that charges multiple storage capacitors, and individual switching circuits that control discharge timing for each laser. This segmentation allows using a standard power supply instead of expensive precision supplies, reducing system complexity while maintaining synchronization.
Solution Approach 2:
The storage capacitors serve their dual function of energy storage and voltage reference. By charging multiple capacitors from the same power supply, they automatically equalize their voltages, eliminating the need for additional voltage regulation circuits or feedback control mechanisms.
3Manufacturing precision
If pulse compression circuits are added to achieve precise temporal overlap, then synchronization precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent performs preliminary voltage equalization by charging all storage capacitors from a common power supply before discharge. This preliminary action ensures that all capacitors start with identical voltage levels, which naturally leads to synchronized discharge timing without requiring additional pulse compression or timing adjustment circuits.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces temporal jitter to the nanosecond range, maintaining the complex temporal pulse shape and energy doubling of the combined laser output without requiring improved power supplies or additional laser components.
Implementation Method 1
first and second storage capacitors (C0A, C0B) arranged to be charged respectively by first and second high-voltage power supplies (HVPS-A, HVPS-B)
Implementation Method 2
A switching arrangement (40) is provided and arranged to connect together the first and second storage capacitors after the capacitors are charged
Data Source
AI summary
Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.