Excimer Laser Chamber Wall Bowing Reduction
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Solution Overview
Problem
High-pressure operation in gas discharge lasers causes deformation and stress on the chamber housing, particularly due to the use of brittle ceramic insulators and thermal gradients, which can lead to cracking and increased weight and cost when using stiffer materials like steel.
Innovation Solution
A chamber design with a pressurized compartment adjacent to the orifice to reduce bowing of the wall and a ceramic insulator with a compressible seal to maintain chamber pressure, and a method involving a cover to establish a compartment for pressurizing the outside surface of the wall, using nitrogen gas to reduce pressure differential across the wall portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If high pressure operation is used to increase pulse energy, then laser pulse energy is improved, but housing deformation and insulator stress increase
Solution Approach 1:
The housing is divided into a pressurized chamber volume and a separate pressurized support compartment. The support compartment is isolated from the chamber volume by a wall with an orifice, allowing independent pressure control. This segmentation enables the support compartment to be pressurized to counteract deformation forces on the housing wall, while the chamber volume maintains its operational pressure for laser generation.
Solution Approach 2:
The invention changes the pressure parameter in the support compartment to counteract the effects of chamber pressure. By pressurizing the support compartment, the pressure differential across the housing wall is reduced, minimizing bowing and deformation. This parameter change allows the housing to maintain structural integrity under high operational pressures without requiring stronger, heavier materials.
2Reliability
If ceramic insulator is used for electrical isolation, then electrical insulation is improved, but susceptibility to cracking from stress and thermal loading increases
Solution Approach 1:
The support compartment is pressurized in advance to counteract the forces that would otherwise deform the housing and stress the ceramic insulator. By establishing this counter-pressure before operational stress occurs, the housing maintains its shape and the insulator remains free from deformation-induced cracking, while still providing necessary electrical isolation.
3Strength
If stiffer material like steel is used for housing, then structural strength is improved, but weight and cost increase
Solution Approach 1:
The invention uses pneumatic pressure in the support compartment to provide structural support instead of relying solely on the mechanical strength of the housing material. By pressurizing the support compartment, the gas pressure counteracts the bowing forces on the housing wall, allowing the use of lighter, less stiff materials while maintaining structural integrity under high operational pressures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces deformation of the insulator and housing wall, maintaining chamber pressure while preventing gas leakage and ozone buildup, thereby enhancing the structural integrity and operational efficiency of high-energy excimer lasers.
Implementation Method 1
a pressurized compartment disposed adjacent the orifice for maintaining a pressure on at least a portion of the outside surface of the wall to reduce bowing of the wall near the orifice due to chamber pressure
Implementation Method 2
a compressible seal may be disposed between the ceramic insulator and the housing wall
Data Source
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AI summary
A chamber for a gas discharge laser is disclosed and may include a chamber housing having a wall, the wall having an inside surface surrounding a chamber volume and an outside surface, the wall also being formed with an orifice. For the chamber, at least one electrical conductor may extend through the orifice to pass an electric current into the chamber volume. A member may be disposed between the conductor and the wall for preventing gas flow through the orifice to allow a chamber pressure to be maintained in the volume. The chamber may further comprise a pressurized compartment disposed adjacent to the orifice for maintaining a pressure on at least a portion of the outside surface of the wall to reduce bowing of the wall near the orifice due to chamber pressure.