Excimer Laser Composite Cavity for Narrow Line-Width and High Power
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Solution Overview
Problem
Conventional excimer laser devices struggle to achieve both narrow line-width and high power output simultaneously, as existing solutions either sacrifice power for line-width narrowing or vice versa, which is crucial for advanced photolithography applications.
Innovation Solution
An excimer laser composite cavity is designed, comprising a laser discharge cavity, a line-width narrowing module, and a laser amplification module, with a beam splitter and grating configuration that narrows the line-width while amplifying power, using a combination of prisms and gratings to control the spectrum and central wavelength, ensuring efficient output.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional combination of a laser and a line-width narrowing module is used, then the line-width is narrowed, but the power output is sacrificed
Solution Approach 1:
The laser cavity is divided into two independent cavities: a first cavity configured for line-width narrowing and a second cavity configured for power amplification. This segmentation allows each cavity to optimize for its specific function without compromising the other, resolving the contradiction between narrow line-width and high power output
Solution Approach 2:
The first laser cavity (line-width narrowing) and second laser cavity (power amplification) are nested within a composite cavity structure, where the output of one cavity serves as input to the other. This nested arrangement enables sequential processing: first narrowing the line-width, then amplifying the power, achieving both objectives simultaneously
2Adaptability or versatility
If the power output and line-width of a laser device are adjusted to meet special requirements, then the laser can be suitable for photolithography, but the device complexity increases
Solution Approach 1:
The complex requirement for simultaneous narrow line-width and high power is segmented into two separate functional cavities, each optimized for one aspect. This segmentation makes the overall system more manageable and easier to control than a single complex cavity attempting to achieve both goals
Solution Approach 2:
The composite cavity structure serves multiple functions: it provides both line-width narrowing and power amplification, and can be configured for different photolithography requirements by adjusting the parameters of the individual cavities. This multi-functionality achieves adaptability without proportionally increasing complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the excimer laser to produce a laser beam with both narrow line-width and high power, suitable for photolithography, by effectively balancing line-width narrowing and power amplification, enhancing its spectral purity and output stability.
Implementation Method 1
the grating is configured to receive the expanded laser beam emitted from the single prism or prism group at an incident angle equivalent to a blazing angle of the grating, so that the laser beam incident on a surface of the grating is dispersed
Implementation Method 2
a laser beam with a wavelength meeting a blazing condition of the grating is reflected back along an opposite direction of its incident path
Implementation Method 3
refract and expand a remaining part of the laser beam
Implementation Method 4
an etalon configured to narrow down the line-width of the laser beam incident thereon and transmit laser beam with a particular central wavelength
Implementation Method 5
a reflector configured to receive the part of the laser beam reflected by the single prism or prism group, and reflect the part of the laser beam back to the laser discharge cavity
Data Source
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AI summary
Disclosed is an excimer laser composite cavity, comprising a laser discharge cavity, a laser output module, a line-width narrowing module, and a laser amplification module. The laser discharge cavity contains work gas for generating laser when it is activated by an excitation source. The laser discharge cavity, the laser output module, and the line-width narrowing module constitute a line-width narrowing cavity configured to narrow down a line-width of the laser generated by the work gas. The laser discharge cavity, the laser output module, and the laser amplification module constitute an amplification cavity configured to amplify power of the laser with the line-width having been narrowed down by the line-width narrowing cavity.