Excimer Laser Gas Control for Impurity Management
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Solution Overview
Problem
Excimer laser apparatuses face performance reduction due to impurity accumulation in the laser gas, leading to increased gas consumption and reduced output, as existing methods for gas replacement and control do not effectively manage impurity levels and gas pressure.
Innovation Solution
A laser gas control system that includes a controller to manage gas pressure and halogen gas concentration, implementing a first gas control to increase pressure and a second gas control to maintain a stable pressure, thereby reducing impurity accumulation and gas consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas replacement is performed frequently to remove impurities, then impurity levels are reduced, but gas consumption increases
Solution Approach 1:
The system performs preliminary gas pressure increase before impurity accumulation reaches critical levels. By proactively increasing gas pressure during operation, the system prevents performance degradation before it occurs, reducing the need for frequent complete gas replacements while maintaining laser output quality
Solution Approach 2:
The control device monitors laser output performance and gas pressure in real-time, using this feedback to dynamically adjust gas supply and replacement operations. This feedback mechanism optimizes gas management by performing replacements only when necessary, balancing impurity removal with gas consumption reduction
2Power
If gas pressure is increased to improve laser output, then laser performance is enhanced, but impurity accumulation increases
Solution Approach 1:
The system implements periodic gas replacement cycles during laser operation. Between these periodic replacements, gas pressure is maintained at higher levels for optimal laser output. This periodic action allows the system to enjoy high power output while systematically removing accumulated impurities at scheduled intervals
Solution Approach 2:
The gas pressure and composition are dynamically adjusted during operation rather than remaining static. The control device modifies gas pressure levels and triggers replacement operations based on real-time monitoring of laser performance and impurity levels, allowing optimal balance between power output and impurity management
3Ease of operation
If gas control operations are simplified, then ease of operation is improved, but gas pressure stability deteriorates
Solution Approach 1:
The control device autonomously manages gas pressure and composition without requiring manual intervention. It automatically monitors laser output, adjusts gas supply rates, and triggers replacement operations based on predetermined criteria, providing self-service gas management that maintains stability while simplifying operator tasks
Solution Approach 2:
Manual gas control operations are replaced with an automated electronic control system. The control device uses sensors and actuators to automatically regulate gas pressure and composition, substituting complex manual mechanical adjustments with automated electronic control that maintains precision while improving ease of operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution effectively moderates performance reduction and minimizes gas consumption by maintaining stable impurity levels and gas pressure, improving the excimer laser's operational efficiency and extending its usage without frequent gas replacements.
Implementation Method 1
a gas supply device configured to supply first laser gas including halogen gas and second laser gas having a halogen gas concentration lower than the first laser gas to the chamber
Implementation Method 2
a pressure sensor configured to measure gas pressure in the chamber
Implementation Method 3
a controller configured to select one of a first gas control and a second gas control based on the gas pressure measured by the pressure sensor
Implementation Method 4
an exhausting device configured to exhaust laser gas in the chamber
Data Source
AI summary
A laser apparatus includes a controller that selects one of a first gas control and a second gas control based on gas pressure measured by a pressure sensor. The first gas control causes at least one of first laser gas and second laser gas is supplied to a chamber such that the gas pressure in the chamber after the first gas control is higher than the gas pressure in the chamber before the first gas control. The second gas control causes at least the first laser gas is supplied to the chamber and causes a part of the laser gas in the chamber is exhausted such that a difference between the gas pressure in the chamber before the second gas control and the gas pressure in the chamber after the second gas control is smaller than a difference between the gas pressure in the chamber before the first gas control and the gas pressure in the chamber after the first gas control.