Automatic Gas Refill Control for Excimer Lasers
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Solution Overview
Problem
Excimer lasers require frequent gas refills due to the degradation of gases over time, necessitating routine replacement, and existing systems require user intervention, which can be inconvenient and prone to missed notifications if the laser is not actively monitored.
Innovation Solution
An automatic gas refill system that monitors elapsed time since the last refill and initiates a refill process by controlling the gas laser and supply, using a computer or controller to power the laser, open gas valves, and purge stale gas, allowing fresh gas to be introduced without human intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual gas refill monitoring is used, then operator control is maintained, but operator attention is required and refill may be missed
Solution Approach 1:
The system automatically monitors elapsed time since last refill, triggers refill operations, and logs refill events without requiring operator intervention. The controller autonomously manages the entire refill process including opening valves, activating pumps, and closing systems, making the system self-servicing for gas refill operations.
Solution Approach 2:
The system continuously monitors the elapsed time since the last gas refill and provides feedback to the controller. When the predetermined time interval is reached, the system automatically initiates the refill process, creating a closed-loop feedback system that ensures timely refills without operator intervention.
2Extent of automation
If automatic refill is implemented, then operator intervention is eliminated, but system complexity increases
Solution Approach 1:
The existing controller of the gas laser system is enhanced to perform multiple functions including time monitoring, refill trigger decisions, valve control, pump activation, and event logging. By making the controller multi-functional, the system achieves high automation without adding separate dedicated components for each function, thus limiting complexity increase.
Solution Approach 2:
The refill monitoring and control functions are merged with the existing laser system controller rather than being implemented as a separate system. The gas valves, pumps, and other refill components are integrated into the existing system architecture, combining multiple functions into unified control structures to minimize complexity.
3Stability of the object's composition
If frequent gas refills are performed, then gas freshness is maintained, but operational downtime increases
Solution Approach 1:
The system monitors elapsed time continuously and triggers gas refills precisely when the predetermined time interval is reached, performing the refill action at the optimal moment. This preliminary timing ensures gas freshness is maintained while minimizing unnecessary refills that would cause downtime.
Solution Approach 2:
The automatic refill system operates continuously in the background, monitoring time and executing refills without requiring operator interruption of laser operations. The system maintains continuous useful action by seamlessly integrating refill operations into the overall system workflow, minimizing disruption to productive operations.
Data Source
AI summary
An apparatus to automatically refill a gas laser is disclosed. The apparatus includes a computing device coupled to a memory. The memory storing instructions that when executed by the computing device cause the computing device to monitor a time elapsed since a last recorded gas refill and when a predetermined time interval is reached since the last recorded gas refill, effectuate a gas refill process to refill the gas laser with gas from a gas supply coupled to the gas laser by automatically controlling the gas laser and the gas supply; and upon completing the gas refill process, record a time stamp of the completed gas refill process. A method and system to automatically refill a gas laser also are disclosed.