Excimer Laser Halogen Gas Pressure Control
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Solution Overview
Problem
Excimer laser apparatuses face challenges in maintaining stable pulse energy due to energy depression caused by electrode deterioration, leading to reduced resolution and productivity in semiconductor manufacturing, particularly due to the wide spectral line widths of KrF and ArF lasers which result in chromatic aberration and require frequent chamber replacement.
Innovation Solution
An excimer laser apparatus that includes an optical resonator with a chamber for storing laser gas, a controller to detect energy depression, and a system for adjusting the partial pressure of halogen gas to suppress energy depression, allowing for extended chamber lifetime and reduced downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the chamber is replaced frequently to maintain stable pulse energy, then the resolution and exposure quality are maintained, but the productivity and operational efficiency are reduced due to frequent downtime
Solution Approach 1:
The system performs preliminary detection of energy depression trends through continuous monitoring of pulse energy, allowing proactive adjustment of halogen gas partial pressure before the chamber performance degrades to a point requiring replacement. This preventive maintenance approach extends chamber operational life while maintaining pulse energy stability.
Solution Approach 2:
The system dynamically adjusts the partial pressure of halogen gas in the laser chamber based on detected energy depression levels. By changing this physical parameter, the system compensates for electrode deterioration effects, maintaining stable pulse energy output and extending the chamber's usable lifetime without frequent replacements.
2Manufacturing precision
If the spectral line width is narrowed to reduce chromatic aberration, then the resolution is improved, but the device complexity increases due to the need for line narrow modules
Solution Approach 1:
The system implements a feedback control mechanism where pulse energy is continuously measured and used to detect energy depression. This feedback loop allows automatic adjustment of halogen gas partial pressure, eliminating the need for complex mechanical intervention and reducing operational complexity while maintaining resolution through stable beam characteristics.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses energy depression, extending the chamber's operational life and minimizing production disruptions by adjusting the halogen gas partial pressure, thereby maintaining stable pulse energy and improving exposure quality.
Implementation Method 1
an electric power source configured to receive a trigger signal and apply a pulsed voltage to the pair of discharge electrodes based on the trigger signal
Implementation Method 2
an energy monitor configured to measure pulse energy of a pulse laser beam outputted from the optical resonator
Data Source
AI summary
An excimer laser apparatus may include an optical resonator, a chamber including a pair of discharge electrodes, the chamber being provided in the optical resonator and configured to store laser gas, an electric power source configured to receive a trigger signal and apply a pulsed voltage to the pair of discharge electrodes based on the trigger signal, an energy monitor configured to measure pulse energy of a pulse laser beam outputted from the optical resonator, a unit for adjusting partial pressure of halogen gas configured to perform exhausting a part of the laser gas stored in the chamber and supplying laser gas to the chamber, and a controller configured to acquire measurement results of the pulse energy measured by the energy monitor, detect energy depression based on the measurement results of the pulse energy, and control the unit for adjusting partial pressure of halogen gas based on results of detecting the energy depression to adjust the partial pressure of halogen gas in the chamber.