Multi-Chamber Excimer Laser Segmentation for Power and Lifetime
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Solution Overview
Problem
High-power excimer gas discharge laser systems face challenges in achieving narrow spectral bandwidth and high average power while maintaining low cost of consumables, particularly at the 193 nm wavelength, due to increased optical damage and limitations in pulse repetition rate and chamber lifetimes.
Innovation Solution
A multi-chamber laser system with a seed laser oscillator and a power amplifier stage using a ring power amplification configuration, which includes a coherence busting mechanism to minimize energy loss and ASE production, allowing for higher repetition rates and improved pulse energy stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single-chamber excimer laser system operates at high pulse repetition rates to achieve high average power, then productivity increases, but optical damage occurs and chamber lifetime decreases
Solution Approach 1:
The laser system is divided into multiple independent chambers, each operating at lower pulse repetition rates. The first chamber operates at a first pulse repetition rate while the second chamber operates at a second pulse repetition rate, allowing each chamber to maintain longer lifetime while the combined system achieves high average power output.
2Productivity
If a single-chamber excimer laser system increases pulse energy to achieve high average power, then productivity increases, but optical damage and cost of consumables increase
Solution Approach 1:
The system segments the power amplification into multiple chambers, allowing each chamber to operate at moderate pulse energies that avoid optical damage while collectively achieving high average power output through combined operation.
3Productivity
If a single-chamber excimer laser system operates at high pulse repetition rates, then productivity increases, but spectral bandwidth stability deteriorates
Solution Approach 1:
The laser system is divided into multiple independent chambers, each operating at lower pulse repetition rates that maintain spectral bandwidth stability. The first chamber operates at a first pulse repetition rate and the second chamber operates at a second pulse repetition rate, allowing each to maintain stable spectral characteristics while the combined system achieves high average power output.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables higher power output with reduced cost of consumables and improved spectral bandwidth stability, addressing the limitations of single-chamber systems and maintaining high performance at elevated pulse repetition rates.
Implementation Method 1
an excimer or molecular fluorine gas discharge laser gain medium amplifying the converted seed laser output to produce a gas discharge laser output beam
Implementation Method 2
pulsed excimer or molecular fluorine gas discharge laser system
Data Source
AI summary
A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage.