Excimer Laser Resonator With XeF2 Vaporization for Narrow Linewidth
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Solution Overview
Problem
Existing KrF and ArF excimer laser devices used in semiconductor exposure apparatuses suffer from significant spectral line widths, leading to chromatic aberration and decreased resolution in projection lenses.
Innovation Solution
A laser device with a narrowed spectral line width is achieved by incorporating a line narrowing module with an XeF2 crystal vaporization system, which generates XeF2 gas that is dissociated into xenon and fluorine, stabilizing pulse energy without the need for a separate xenon gas cylinder.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a line narrowing module is provided in the laser resonator to narrow the spectral line width, then the chromatic aberration is reduced and resolution is improved, but the device complexity increases
Solution Approach 1:
The patent combines the line narrowing function with the existing laser resonator structure by integrating a line narrowing element (such as an etalon or grating) into the resonator cavity. This merging approach allows the laser device to achieve both laser oscillation and spectral line narrowing within a single integrated structure, reducing the need for separate external line narrowing modules and thereby decreasing overall device complexity while maintaining improved resolution.
Solution Approach 2:
The laser resonator is designed to perform multiple functions simultaneously: it serves as both the oscillation cavity for generating laser light and as the line narrowing mechanism through the integrated line narrowing element. This multi-functionality allows the same structural component to address both laser generation and spectral purification, eliminating the need for additional dedicated line narrowing hardware and thus reducing device complexity.
2Manufacturing precision
If a line narrowing module is provided in the laser resonator to narrow the spectral line width, then the chromatic aberration is reduced and resolution is improved, but the device complexity increases
Solution Approach 1:
The line narrowing element is integrated directly into the laser resonator cavity, merging the chromatic aberration correction function with the existing laser oscillation structure. This integration eliminates the need for separate external line narrowing modules, thereby reducing device complexity while achieving reduced chromatic aberration and improved resolution.
Solution Approach 2:
The laser resonator is designed to perform multiple functions simultaneously: it serves as both the oscillation cavity for generating laser light and as the line narrowing mechanism through the integrated line narrowing element. This multi-functionality allows the same structural component to address both laser generation and spectral purification, eliminating the need for additional dedicated line narrowing hardware and thus reducing device complexity.
3Device complexity
If XeF2 crystal is used to generate xenon and fluorine gas, then the need for separate xenon gas cylinder is eliminated and device complexity is reduced, but the control of gas supply becomes more difficult
Solution Approach 1:
The patent employs temperature control as a parameter to regulate the vaporization rate of the XeF2 crystal. By precisely controlling the temperature of the XeF2 crystal, the system can modulate the amount of XeF2 gas generated, which subsequently dissociates into xenon and fluorine gases. This temperature-based control mechanism provides a straightforward and reliable method to manage gas supply, overcoming the operational difficulties that would otherwise arise from eliminating the separate xenon gas cylinder.
Solution Approach 2:
The patent replaces the mechanical gas storage and supply system (xenon gas cylinder with pressure regulation) with a thermal-based gas generation system. Instead of using a pressurized gas cylinder that requires mechanical handling and pressure control, the system uses controlled thermal vaporization of XeF2 crystal to generate the required gases in situ. This substitution simplifies the overall device structure while providing controllable gas supply through temperature management.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively narrows the spectral line width of the laser light, reducing chromatic aberration and enhancing the resolution of the semiconductor exposure process, while also eliminating the need for costly xenon gas handling systems.
Implementation Method 1
an XeF2 crystal to be vaporized as being arranged in an XeF2 vaporization space communicating with the gas supply port
Data Source
AI summary
A laser device includes a laser chamber configured to accommodate laser gas including fluorine, a pair of discharge electrodes arranged inside the laser chamber, a gas supply port arranged in the laser chamber, and an XeF2 crystal to be vaporized as being arranged in an XeF2 vaporization space communicating with the gas supply port.