Excimer Light Source Gas Optimization Post-Refill
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Solution Overview
Problem
Excimer light sources in photolithography face challenges in optimizing operating characteristics after gas refill, leading to inefficiencies and reduced performance due to changes in gas mixture composition and pressure, which affect the quality and stability of the deep ultraviolet light produced.
Innovation Solution
A method involving a two-stage gas discharge system with adjustable gas mixtures and pulsed energy sources, where extreme test conditions are used to estimate operating parameters, and adjustments are made to gas pressure and optical features based on measured values to optimize the light source's performance, including adjusting the gas mixture composition and pressure to maintain optimal operating margins.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas refill is performed in excimer light sources, then gas mixture composition and pressure are restored, but operating characteristics become suboptimal due to lack of optimization post-refill
Solution Approach 1:
The system performs preliminary characterization of extreme operating conditions (minimum and maximum values of operating parameters) during initial system setup or after gas refill. This preliminary data collection enables subsequent optimization of operating characteristics without requiring time-consuming real-time adjustments, thus resolving the contradiction between reliability restoration and efficiency maintenance
Solution Approach 2:
The system continuously monitors operating parameters and uses feedback control to adjust operating characteristics based on measured deviations from optimal values. This feedback mechanism ensures that after gas refill, the system automatically re-optimizes its operating parameters to maintain both reliability and productivity at optimal levels
2Reliability
If extreme test conditions are used to estimate operating parameters, then optimization robustness is improved, but measurement time and complexity increase
Solution Approach 1:
Instead of performing complete and exhaustive characterization of all operating conditions, the system focuses on measuring only the extreme values (minimum and maximum) of critical operating parameters. This partial measurement approach provides sufficient information for robust optimization while significantly reducing the time and complexity compared to comprehensive characterization
Solution Approach 2:
The extreme value measurements are performed as a preliminary step during system initialization or after gas refill, rather than continuously during normal operation. This preliminary characterization establishes baseline optimization parameters that can be applied immediately, reducing the time loss during actual production operations
3Reliability
If gas mixture composition and pressure are adjusted post-refill, then operating margins are maintained, but system complexity and adjustment procedures increase
Solution Approach 1:
The system performs self-adjustment of operating characteristics after gas refill by automatically comparing measured operating parameters against pre-characterized extreme values and applying appropriate corrections. This self-service capability maintains operating margins without requiring complex manual adjustment procedures or external intervention, thus resolving the contradiction between reliability maintenance and system complexity
Solution Approach 2:
The system optimizes operating characteristics by making controlled changes to key parameters such as gas pressure, pulse energy, and timing based on measured deviations from optimal operating margins. These parameter adjustments are guided by pre-characterized extreme values, simplifying the adjustment process while maintaining reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for rapid and robust optimization of the gas discharge system, improving the light source's efficiency and stability, enabling longer operation times while maintaining specified energy and spectral properties, and effectively compensating for disturbances post-refill.
Implementation Method 1
a first pulsed energy source configured to supply a group of pulses of energy to the first gas mixture... a second pulsed energy source configured to supply a group of pulses of energy to the second gas mixture
Implementation Method 2
produce a first pulsed amplified light beam from the first stage... produce a second pulsed amplified light beam
Data Source
AI summary
In a method, energy is supplied to a first gas discharge chamber of a first stage until a pulsed amplified light beam is output from the first stage and directed toward a second stage. While the energy is supplied to the first gas discharge chamber: a value of an operating parameter of the first gas discharge chamber is measured; it is determined whether to adjust an operating characteristic of the first gas discharge chamber based on the measured value; and, the operating characteristic of the first gas discharge chamber is adjusted if it is determined that the operating characteristic of the first gas discharge chamber should be adjusted. After it is determined that the operating characteristic of the first gas discharge chamber no longer should be adjusted, then an adjustment procedure is applied to an operating characteristic of a second gas discharge chamber of the second stage.