Exhaust Duct Gas Sampling Layout for Accurate Leak Detection
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Solution Overview
Problem
Existing gas detection systems in substrate processing apparatuses are inefficient in detecting processing gases that leak into the gas box, leading to inaccuracies in gas detection.
Innovation Solution
A gas detection device with a suctioner having multiple suction holes at different positions perpendicular to the exhaust duct's central axis and a gas detector to enhance the detection of processing gases, improving the accuracy of gas detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a gas sensor is provided in the exhaust port to detect processing gas leaking into the gas box, then gas detection capability is provided, but detection accuracy is insufficient
Solution Approach 1:
The exhaust duct is divided into multiple sampling positions along its length, with gas sensors positioned at each segment. This segmentation allows detection of processing gas leaks at different locations within the gas box, improving both detection accuracy and reliability by capturing leak information from multiple zones rather than relying on a single exhaust port measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution significantly enhances the accuracy of detecting processing gases leaking into the gas box, ensuring comprehensive gas detection and reducing inaccuracies.
Implementation Method 1
a suctioner having a plurality of suction holes for sucking the processing gas at different positions in a cross section perpendicular to a central axis of an exhaust duct
Data Source
AI summary
A gas detection device for detecting a processing gas leaking into a gas box includes: a suctioner having a plurality of suction holes for sucking the processing gas at different positions in a cross section perpendicular to a central axis of an exhaust duct that evacuates an interior of the gas box; and a gas detector configured to detect the processing gas sucked by the suctioner.