Exhaust Duct Design for Substrate Processing Gas Flow
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Solution Overview
Problem
Existing exhaust devices for substrate processing chambers face challenges in efficiently exhausting gas due to high flow resistance, leading to decreased exhaust efficiency and non-uniform treatment of substrates.
Innovation Solution
The exhaust device incorporates a bowl with an exhaust duct surrounding its side portion, connected through communication holes, and a discharge duct formed outwardly in the rotational direction of the support unit. Additionally, vanes are arranged within the exhaust duct to minimize flow resistance and enhance gas flow efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If an integrated duct connecting multiple exhaust pipes is used to exhaust gas from multiple bowls simultaneously, then the exhaust system can handle multiple processing spaces, but the flow resistance of gas increases and exhaust efficiency decreases
Solution Approach 1:
The exhaust system is segmented into individual exhaust ducts for each bowl rather than using a single integrated duct. Each exhaust duct is connected to its corresponding bowl independently, allowing gas to be exhausted from multiple processing spaces simultaneously without the flow resistance issues that would arise from a consolidated duct system. This segmentation maintains adaptability while preserving exhaust efficiency.
2Ease of operation
If exhaust pipes are connected to the bottom wall of the bowl, then the exhaust unit can be coupled to the processing space, but the flow resistance of gas increases and exhaust efficiency decreases
Solution Approach 1:
The exhaust duct connection is moved from the bottom wall (vertical dimension) to the side portion (horizontal dimension) of the bowl. The exhaust duct is configured to surround the side portion of the bowl and connect laterally, allowing gas to flow horizontally into the exhaust duct rather than having to travel upward against gravity and flow resistance. This dimensional change significantly reduces flow resistance while maintaining ease of coupling.
3Productivity
If communication holes are formed on the side portion of the bowl, then the bowl and exhaust duct can be connected, but the structure becomes more complex
Solution Approach 1:
The side portion of the bowl is made porous through the formation of multiple communication holes, allowing gas to pass through from the bowl interior to the exhaust duct. This porous structure provides multiple flow paths for gas exhaust, significantly improving exhaust efficiency by reducing flow resistance. While the structure becomes slightly more complex, the benefit to exhaust performance is substantial, and the holes can be formed using standard manufacturing techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for efficient gas exhaust by minimizing flow resistance through lateral gas flow and centrifugal force, thereby improving exhaust efficiency and ensuring uniform substrate treatment.
Implementation Method 1
This configuration allows for efficient gas exhaust by minimizing flow resistance through lateral gas flow and centrifugal force
Data Source
AI summary
Provided are an exhaust device and a substrate processing apparatus. The exhaust device includes a bowl disposed around a support unit supporting and rotating a substrate, an exhaust duct configured to surround a side portion of the bowl and connected to the side portion of the bowl, and a discharge duct formed outwardly of the exhaust duct, in a rotational direction of the support unit.