Semiconductor Exhaust Pipe Cleaning Assembly for Clog Prevention
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Solution Overview
Problem
Semiconductor process tool exhaust pipes become clogged with excess processing materials and by-products, leading to unstable photoresist layer thickness, reduced process quality, and potential corrosion, necessitating an effective cleaning solution.
Innovation Solution
An automated exhaust pipe cleaning assembly with a sensor-driven residue remover and cleaning agent dispenser that periodically or self-activates to maintain pipe capacity, utilizing a gas-liquid separator to prevent harmful materials from reaching the factory exhaust.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If exhaust pipes are used to remove excess processing materials and by-products, then process quality is maintained, but exhaust pipes become clogged and corroded over time
Solution Approach 1:
The system performs preliminary cleaning actions by injecting cleaning agents into the exhaust pipe before complete clogging occurs. Sensors detect early accumulation of photoresist and other materials, triggering automated cleaning cycles that prevent severe blockages and corrosion.
Solution Approach 2:
The exhaust pipe cleaning system is self-service, using automated sensors and cleaning agent injection to maintain itself without manual intervention. The system monitors its own condition and performs cleaning operations autonomously, reducing the need for external maintenance.
2Reliability
If manual cleaning of exhaust pipes is performed, then clogging is removed, but productivity is reduced and maintenance intervals are shortened
Solution Approach 1:
The system automatically monitors and cleans the exhaust pipe without requiring manual intervention or process interruptions. Sensors detect material accumulation and trigger automated cleaning cycles, maintaining exhaust pipe capacity while eliminating productivity losses from manual cleaning operations.
Solution Approach 2:
The system uses sensors to continuously monitor exhaust pipe conditions and provides feedback to the control system. When material accumulation reaches threshold levels, the system automatically initiates cleaning operations, ensuring optimal exhaust performance without manual intervention or process downtime.
3Reliability
If cleaning agents are injected into exhaust pipes, then accumulated materials are removed, but device complexity increases
Solution Approach 1:
The cleaning agent injection system serves multiple functions: it dissolves accumulated photoresist, flushes debris through the exhaust pipe, and prevents corrosion. This multi-functionality justifies the added complexity by providing comprehensive maintenance capabilities in a single integrated system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures stable exhaust conditions, reduces manual cleaning needs, prevents corrosion, and prolongs maintenance intervals by effectively removing accumulated materials and separating liquids from gases, thereby enhancing process quality and productivity.
Implementation Method 1
a gas-liquid separator to separate liquids from gases
Data Source
AI summary
Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.