Exhaust Pipe Cooling in Semiconductor Cleaning Cycles
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The inner wall of the exhaust pipe in semiconductor device manufacturing processes is prone to corrosion during the cleaning process due to the use of corrosive gases, which can lead to equipment damage and increased maintenance costs.
Innovation Solution
A technique involving alternating cycles of cleaning the process chamber with a fluorine-based gas and cooling the exhaust pipe by stopping the distribution of the cleaning gas, allowing the pipe to cool naturally, thereby preventing overheating and corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If cleaning gas is supplied into the process chamber and exhausted through the exhaust pipe, then the process chamber interior is cleaned, but the exhaust pipe inner wall is corroded
Solution Approach 1:
The cleaning gas supply is performed periodically in cycles rather than continuously. Each cycle includes a cleaning phase where cleaning gas flows through the exhaust pipe, followed by a cooling phase where gas supply is stopped. This periodic action allows the exhaust pipe to cool down between cleaning operations, preventing cumulative thermal damage and corrosion from the corrosive cleaning gas
Solution Approach 2:
The cooling phase is introduced as a preliminary protective measure before the next cleaning operation begins. By allowing the exhaust pipe to cool down and reducing residual cleaning gas distribution during the cooling phase, the system prepares the exhaust pipe in a less vulnerable state against corrosion before the next cleaning cycle starts
2Reliability
If cleaning gas is continuously supplied to clean the process chamber, then cleaning effectiveness is improved, but the exhaust pipe temperature increases causing corrosion
Solution Approach 1:
The cleaning gas supply is interrupted periodically to allow cooling. The system alternates between cleaning phases (gas supply on) and cooling phases (gas supply off), preventing continuous temperature buildup in the exhaust pipe while still achieving effective cleaning over time
Solution Approach 2:
The cooling phase is utilized as a productive period where no cleaning gas is consumed and the exhaust pipe naturally cools down. This maintains the useful action of temperature reduction without requiring additional cooling equipment or energy input, making the overall process more efficient
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively prevents corrosion of the exhaust pipe by maintaining the exhaust pipe temperature below the critical corrosion threshold, reducing maintenance costs and extending the equipment's lifespan.
Implementation Method 1
cooling the exhaust pipe by maintaining a state where distribution of the cleaning gas into the exhaust pipe is substantially stopped
Data Source
AI summary
There is provided a cleaning method including cleaning an interior of a process chamber in which a substrate is processed, by supplying a cleaning gas into the process chamber and exhausting the cleaning gas from the process chamber via an exhaust pipe; and cooling the exhaust pipe by maintaining a state where distribution of the cleaning gas into the exhaust pipe is substantially stopped. Also, the act of cleaning the interior of the process chamber and the act of cooling the exhaust pipe are repeated alternately.