Heating Means for Exhaust Pipe Sublimation Prevention
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Solution Overview
Problem
In semiconductor and display manufacturing processes, harmful gases like PFCs generate powder in exhaust pipes due to sublimation when discharged from process chambers, leading to ozone layer destruction and regulatory challenges, and existing treatments are ineffective in preventing this powder formation.
Innovation Solution
A piping apparatus with a harmful gas treatment device equipped with a heating means is installed between the vacuum pump and exhaust pipe, positioned at the sublimation point to prevent sublimation of components within the exhaust gas, using a plasma reaction part and catalyst treatment to maintain temperature and prevent powder formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If exhaust gas is discharged through the exhaust pipe without heating treatment, then the harmful gas treatment device can treat the harmful gas, but powder is generated in the exhaust pipe due to sublimation of components
Solution Approach 1:
The heating means is positioned upstream of the sublimation condition occurrence point to preemptively heat the exhaust gas before it reaches the temperature and pressure conditions that would cause sublimation. This preliminary heating action prevents powder formation before it can occur, rather than attempting to address it after sublimation has begun.
Solution Approach 2:
The heating means acts as an intermediary device between the vacuum pump and the exhaust pipe, modifying the temperature of the exhaust gas to prevent the harmful sublimation effect. This intermediary heating action creates a buffer that stops the direct path from exhaust gas to powder formation in the pipe.
2Object-affected harmful factors
If the heating means is positioned downstream of the sublimation condition occurrence point, then the harmful gas can be treated, but powder has already formed in the exhaust pipe
Solution Approach 1:
The heating means is positioned upstream of the sublimation condition occurrence point to preemptively heat the exhaust gas before it reaches the temperature and pressure conditions that would cause sublimation. This preliminary heating action prevents powder formation before it can occur, rather than attempting to address it after sublimation has begun.
3Object-affected harmful factors
If the heating means increases the temperature of exhaust gas significantly, then sublimation is prevented, but energy consumption increases
Solution Approach 1:
The heating means is positioned specifically at the location where sublimation conditions occur, applying heat only in the critical zone where temperature and pressure conditions lead to sublimation. This localized heating approach prevents powder formation without requiring significant temperature increase throughout the entire exhaust system, thereby reducing energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents powder generation in exhaust pipes by maintaining the temperature of exhaust gases above the sublimation point, ensuring efficient treatment of harmful gases and compliance with environmental regulations.
Implementation Method 1
Gas, such as ammonium chloride (NH4Cl), contained in the exhaust gas that passes through the pipe is generated due to sublimation caused by temperature fall or pressure rising
Implementation Method 2
A piping apparatus with a harmful gas treatment device equipped with a heating means is installed between the vacuum pump and exhaust pipe, positioned at the sublimation point to prevent sublimation of components within the exhaust gas, using a plasma reaction part and catalyst treatment
Implementation Method 3
using a plasma reaction part and catalyst treatment to maintain temperature and prevent powder formation
Data Source
AI summary
A piping apparatus includes an exhaust pipe providing a passage through which the exhaust gas discharged, and a harmful gas treatment device positioned between a rear end of the vacuum pump and a front end of the exhaust pipe or positioned on the exhaust pipe, wherein the harmful gas treatment device includes a heating means for increasing the temperature of the exhaust gas so as to prevent a sublimable component, from among components included in the exhaust gas, from being sublimated and accumulated inside the exhaust pipe, and the heating means is positioned on a section including a sublimation condition occurrence point, at which a sublimation condition of the sublimable component occurs, and an upstream side of the sublimation condition occurrence point on the exhaust pipe, and the sublimation condition is a temperature condition for the pressure of the sublimable component.