Substrate Treating Exhaust Pipe Junction Design
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate treating apparatuses face frequent clogging of exhaust pipes due to sublimate deposition, leading to reduced availability and increased maintenance costs, as they rely on temperature insulation and reduced pipe diameters to manage exhaust gas flow effectively.
Innovation Solution
The apparatus includes a first and second bake group with exhaust pipes that intersect at a midstream junction, where exhaust gases from the second bake group, operating at higher temperatures, mix with those from the first bake group, reducing temperature gradients and minimizing sublimate deposition in the first exhaust pipe, thus reducing maintenance needs and costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a jacketed pipe is used for thermal insulation of the exhaust pipe, then the temperature of exhaust gases is maintained to prevent sublimate deposition, but the cost increases
Solution Approach 1:
The patent merges two separate exhaust pipes into a single common exhaust pipe that collects exhaust gases from multiple baking units. This consolidation eliminates the need for expensive thermal insulation on multiple pipes while maintaining effective exhaust gas removal through a single standardized pipe configuration.
2Reliability
If the internal diameter of the exhaust pipe is reduced to increase flow speed, then the exhaust gases are discharged before temperature reduction, but the flow speed cannot be increased too much
Solution Approach 1:
The patent segments the exhaust system into multiple separate exhaust pipes, each serving specific baking units. This segmentation allows each pipe to be optimized independently with appropriate diameter and flow characteristics, avoiding the need for complex diameter variations in a single pipe while effectively managing exhaust gas flow and temperature.
3Ease of operation
If multiple baking units are provided with separate exhaust pipes, then each group can be managed independently, but the number of exhaust pipes and complexity increases
Solution Approach 1:
The patent combines exhaust pipes from multiple baking units into a single common exhaust pipe with systematically arranged connections. This merging reduces the total number of exhaust pipes and simplifies the overall system while maintaining independent controllability through strategic placement of connection points and flow distribution design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses sublimate deposition in the first exhaust pipe, enhancing the apparatus's availability and reducing maintenance requirements while maintaining efficient gas flow, as demonstrated by temperature simulations showing improved exhaust gas temperatures and reduced clogging.
Implementation Method 1
a baking unit for heating a substrate to which a treating liquid that generates sublimate through heating is applied to bake a surface of the substrate
Implementation Method 2
a treating liquid that generates sublimate through heating
Implementation Method 3
a first exhaust pipe that forms a flow path of exhaust gases from the first bake group
Data Source
AI summary
Disclosed is a substrate treating apparatus with a baking unit for heating a substrate to which a treating liquid that generates sublimate through heating is applied to bake a surface of the substrate to form a coat film. The apparatus includes the following elements: a first bake group, a second bake group, a first exhaust pipe that forms a flow path of exhaust gases from the first bake group with its end being in fluid communication with an exhaust gas processor that processes the exhaust gases, a second exhaust pipe that forms a flow path of exhaust gases from the second bake group, and a junction provided at a midstream of the first exhaust pipe and in fluid communication with a downstream side of the second exhaust pipe.