Exhaust Pipe Mist Cleaning for Fume-Stable Substrate Treatment
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Solution Overview
Problem
The deposition of fumes in exhaust pipes during substrate treatment processes leads to reduced exhaust efficiency and potential process failures due to increased pressure, especially in systems with collective exhaust pipes connected to multiple process chambers.
Innovation Solution
A substrate treating apparatus equipped with a cleaning solution supply unit that includes a cleaning nozzle to spray a cleaning solution in the form of mist, directed towards a discharge pipe, to prevent fume deposition in the exhaust pipes, and a controller to regulate the cleaning solution based on fume levels and system abnormalities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a collective exhaust pipe is used to exhaust gas from multiple liquid treatment chambers, then the exhaust system can handle multiple chambers, but fume deposition in the exhaust pipe is exacerbated leading to reduced exhaust efficiency
Solution Approach 1:
The exhaust system is segmented into multiple individual exhaust pipes, each connected to a specific liquid treatment chamber. This segmentation prevents fumes from multiple chambers from mixing and depositing in a single collective pipe, thereby maintaining exhaust efficiency while still providing comprehensive exhaust coverage for all chambers.
Solution Approach 2:
A cleaning solution supply unit is installed in each exhaust pipe to preliminarily clean fumes before they can deposit. The cleaning solution is supplied in advance to prevent fume deposition, maintaining exhaust passage畅通 and ensuring continuous reliable exhaust operation.
2Quantity of substance
If fume deposition occurs in the exhaust pipe, then the exhaust passage is narrowed, but this leads to increased pressure and hunting phenomenon causing process failure
Solution Approach 1:
The exhaust system incorporates self-cleaning functionality through cleaning solution supply units installed within the exhaust pipes. These units automatically supply cleaning solution to remove fume deposits, enabling the system to maintain itself without external intervention and preventing pressure buildup that would cause process failures.
Solution Approach 2:
The system monitors exhaust conditions and uses this feedback to control the cleaning solution supply. When fume deposition is detected or predicted, the cleaning solution supply unit is activated to remove deposits, creating a closed-loop control system that maintains stable exhaust operation and prevents process failures.
3Reliability
If cleaning solution is supplied to prevent fume deposition, then exhaust efficiency is maintained, but the system complexity increases
Solution Approach 1:
The cleaning solution supply unit is merged with the exhaust pipe structure, integrating the cleaning function directly into the exhaust system. This integration minimizes additional components and simplifies the overall system architecture while maintaining exhaust efficiency through automated cleaning.
Solution Approach 2:
The exhaust pipe system is designed with multi-functionality, serving both as an exhaust passage and as a conduit for cleaning solution delivery. This universal design allows a single structure to perform multiple functions, reducing the need for separate dedicated cleaning systems and thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents fume deposition in exhaust pipes, maintaining efficient exhaust operations and preventing process failures by effectively removing fumes through controlled mist application.
Implementation Method 1
a first cleaning solution supply unit provided in the exhaust pipe to supply a cleaning solution to the gas flowing through the first exhaust passage
Implementation Method 2
a first cleaning nozzle that sprays a cleaning solution
Implementation Method 3
the cleaning solution supplied to the first exhaust passage flows down along the inner wall of the exhaust pipe
Implementation Method 4
an inlet of the first cleaning solution discharge pipe and the first cleaning nozzle may be provided to be opposed to each other in an upward and downward direction
Data Source
AI summary
Provided is an apparatus for treating a substrate. The apparatus includes an exhaust unit for exhausting gas in a treatment space of a liquid treatment chamber. The exhaust unit includes: an exhaust pipe connected to the liquid treatment chamber and having an exhaust passage through which gas exhausted from the treatment space flows; a cleaning solution supply unit provided in the exhaust pipe and supplying a cleaning solution to the gas flowing through the exhaust passage; and a cleaning solution outlet pipe connected to the exhaust pipe and through which the cleaning solution supplied to the exhaust passage is discharged.