Exhaust Pump Connecting Opening Design for Easy Deburring
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Solution Overview
Problem
Existing exhaust pumps face challenges in enhancing gas evacuation performance due to burr formation during the drilling of connecting opening portions, which hampers deburring operations and is exacerbated by the increasing size of sealed chambers in semiconductor, flat panel, and solar panel manufacturing.
Innovation Solution
The exhaust pump design includes a cylindrical rotating member with a plate body and ring-like projection, featuring holes cut out from the outer peripheral section and ring-like projection, where the holes open as horizontal holes covered by the cylindrical body, allowing for easy deburring and enhanced gas evacuation through a drag effect, without interference from rotor blades.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If connecting opening portions are formed through drilling from the inward side of the cylindrical rotating member, then gas evacuation performance is enhanced through parallel-flow evacuation scheme, but burr forms at the upstream end of the connecting opening portions making deburring operation difficult
Solution Approach 1:
The patent inverts the drilling direction by forming connecting opening portions from the outward side of the cylindrical rotating member instead of from the inward side. This allows the drilling tool to access the opening portions without interference from rotor blades, enabling easy deburring operation while maintaining the parallel-flow evacuation scheme for enhanced gas evacuation performance
Solution Approach 2:
The patent performs the deburring operation during the drilling process itself by forming the connecting opening portions from the outward side, where the tool can simultaneously complete the hole formation and remove burrs. This preliminary action eliminates the need for separate deburring operations after the component is assembled
2Productivity
If rotor blades exist above the upstream end of connecting opening portions, then parallel-flow evacuation scheme is achieved, but rotor blades hamper the deburring operation
Solution Approach 1:
The patent resolves the interference between rotor blades and deburring operation by inverting the drilling approach. Instead of drilling from the inward side where rotor blades block access, the connecting opening portions are formed from the outward side, allowing the deburring tool to operate freely without hampering from the rotor blades
3Quantity of substance
If sealed chambers increase in size, then more gases are used in manufacturing processes, but existing exhaust pumps cannot provide sufficient evacuation performance
Solution Approach 1:
The patent segments the gas evacuation pathway into multiple parallel channels: an outer thread groove exhaust passage and an inner thread groove exhaust passage connected through connecting opening portions. This segmentation creates parallel-flow evacuation scheme that increases the total evacuation capacity, enabling the pump to handle larger amounts of gases from bigger sealed chambers
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables efficient burr removal and improved gas evacuation performance by facilitating easy deburring and effective gas evacuation, even with larger sealed chambers.
Implementation Method 1
a helical outer thread groove exhaust passage provided between the cylindrical rotating member and the outer cylindrical fixed member; a helical inner thread groove exhaust passage provided between the cylindrical rotating member and the inner cylindrical fixed member
Data Source
Figure 1
Figure 2
Figure 3(a)~3(c)
AI summary
Provided is an exhaust pump that comprises connecting opening portions that can be deburred easily and that are suitable for enhancing gas evacuation performance. A rotor (a cylindrical rotating member) of an exhaust pump comprises a plate body that has a ring-like projection on a reverse side outer peripheral section of the rotor, and a cylindrical body that is fitted into an outer periphery of the ring-like projection. Connecting opening portions of the exhaust pump comprise holes that are formed by notching an outer peripheral section of the plate body and an outer peripheral section of the ring-like projection, and a portion (specifically, a hole) of the holes that opens in the form of a horizontal hole is covered by an outer-peripheral upper end portion of the cylindrical body.