Multi-Equipment Exhaust Sequencing for Central Pipe Pressure Stability
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Solution Overview
Problem
Inefficient exhaust management in multi-equipment systems can lead to damage and defects in process chambers and pipes due to improper discharge of gases, resulting from inadequate pressure control during the manufacturing processes of semiconductors, display panels, or solar cells.
Innovation Solution
A method of controlling exhaust by simulating and optimizing the activation/deactivation order of equipment based on central pipe pressure, using a simulation performance unit to determine optimal activation/deactivation sequences, and storing results in a database for controlled exhaust management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple equipment are activated or deactivated simultaneously in a multi-equipment system, then productivity is improved, but pressure instability in the central pipe occurs causing equipment damage and process defects
Solution Approach 1:
The system performs preliminary simulation to determine the optimal activation/deactivation order of equipment before actual operation. By pre-calculating the sequence that minimizes pressure fluctuations, the system avoids pressure instability while maintaining efficient exhaust performance during simultaneous equipment operation.
Solution Approach 2:
The system dynamically adjusts the activation and deactivation sequence of equipment based on simulated pressure conditions. Rather than fixed timing, the control strategy adapts the order of equipment activation/deactivation to maintain pressure stability within acceptable ranges while achieving high productivity.
2Measurement precision
If additional pressure sensors are installed to monitor pressure changes in each pipe, then measurement precision is improved, but device complexity increases
Solution Approach 1:
A simulation model acts as an intermediary between the central pipe pressure sensor and the individual equipment pipes. The simulation predicts pressure changes in each equipment pipe based on the central pipe pressure data and equipment activation/deactivation status, eliminating the need for additional physical sensors while maintaining measurement precision.
Solution Approach 2:
The patent replaces physical pressure sensors in each pipe with a computational simulation system. By substituting mechanical sensing devices with software-based pressure prediction, the system achieves accurate pressure monitoring without increasing hardware complexity or sensor quantity.
Data Source
AI summary
A method of controlling exhausting of equipment in a multi-equipment system includes receiving an input of information about a plurality of equipment and a plurality of pipes corresponding to the plurality of equipment, where the plurality of pipes are connected to a central pipe, performing a simulation of activation or deactivation of the plurality of equipment based on the information and based on a pressure of the central pipe, and determining an activation order or a deactivation order for the plurality of equipment based on a result of the simulation.