Exhaust System Segmentation for Extended Maintenance
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Solution Overview
Problem
Conventional exhaust traps in semiconductor manufacturing have a short preventive maintenance cycle, leading to frequent maintenance needs and potential decreases in exhaust performance and vacuum pump troubles due to deposition of products on inner walls.
Innovation Solution
An exhaust system with a first and second exhaust trap configuration, where the first trap cools exhaust gases and the second trap further processes them, combined with a storage unit to extend the preventive maintenance cycle by effectively trapping and storing products, thereby reducing maintenance frequency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional exhaust trap is used, then exhaust gases are trapped, but the preventive maintenance cycle is short due to product deposition on inner walls
Solution Approach 1:
The exhaust trap is divided into multiple traps (first exhaust trap and second exhaust trap) arranged in series. Each trap handles a portion of the exhaust flow and product deposition, distributing the contamination load and extending the maintenance cycle for each individual trap while maintaining overall exhaust performance.
2Object-generated harmful factors
If exhaust gases are cooled to trap products, then product deposition is reduced, but maintenance frequency increases due to shorter PM cycle
Solution Approach 1:
Multiple exhaust traps are used in series, each performing cooling and trapping functions. This segmentation allows the deposition burden to be distributed across multiple units, reducing the rate of deposition per trap and extending the preventive maintenance cycle while maintaining effective product trapping.
Solution Approach 2:
The exhaust gas temperature is reduced through cooling in the exhaust traps, changing the physical state of products from vapor to condensed form. This parameter change (temperature reduction) enables effective product trapping while the multi-trap configuration manages the deposition consequence.
3Duration of action of stationary object
If multiple exhaust traps are installed in series, then preventive maintenance cycle is extended, but device complexity increases
Solution Approach 1:
The exhaust system is segmented into multiple traps connected in series through pipes. While this increases the number of components, each trap is a standardized unit that can be independently maintained, and the modular segmentation actually simplifies the maintenance process by allowing individual trap replacement or servicing without shutting down the entire system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system extends the preventive maintenance cycle, ensuring efficient cooling and trapping of exhaust gases, reducing the likelihood of product deposition and maintaining optimal exhaust performance and vacuum pump operation.
Implementation Method 1
a first exhaust trap having an exhaust input at an upper portion of the first exhaust trap and an exhaust output at a lower portion of the first exhaust trap and configured to cool a product produced in the substrate processing apparatus
Data Source
AI summary
An exhaust system connected to an exhaust port of a substrate processing apparatus includes: a first exhaust trap having an exhaust input at an upper portion thereof and an exhaust output at a lower portion thereof and cooling a product produced in the substrate processing apparatus; a second exhaust trap installed at a downstream side of an exhaust flow with respect to the first exhaust trap, having an exhaust input at a lower portion thereof and an exhaust output at an upper portion thereof, and cooling the product; a storage unit installed between the first and second exhaust traps and storing the product cooled by the first and second exhaust traps; a first pipe connecting the exhaust port of the substrate processing apparatus and the first exhaust trap; and a second pipe connecting the first exhaust trap, the second exhaust trap and the storage unit.