Exhaust Trap Fin Cooling for Semiconductor Byproduct Entrapment
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Solution Overview
Problem
Existing trap devices and semiconductor manufacturing devices face challenges in efficiently entrapment of byproducts contained in exhaust gases, leading to environmental pollution and potential system breakdowns due to deposits and reduced conductance.
Innovation Solution
A trap device with a fin member and cooling jacket configuration that turns back exhaust gas flow to enhance entrapment efficiency, utilizing a fin member to redirect exhaust gas and a cooling jacket to resolidify and trap byproducts within the device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If exhaust gas flows directly through the trap device without redirection, then the device structure remains simple, but the entrapment efficiency of byproducts is insufficient
Solution Approach 1:
The exhaust path is divided into multiple segments: the introduction pipe, the redirection path via fin member, and the exhaust path forming member. This segmentation allows the exhaust gas to follow a longer, more effective trajectory through the cooling zones, improving entrapment efficiency without creating an overly complex monolithic structure
Solution Approach 2:
The fin member acts as an intermediary element that redirects the exhaust gas flow from the introduction pipe toward the exhaust path forming member. This intermediary component enables the gas to be redirected and cooled more effectively without requiring direct redesign of the entire exhaust system
2Temperature
If the trap device uses simple exhaust path configuration, then the device complexity is low, but the exhaust gas does not cool efficiently reducing byproduct entrapment
Solution Approach 1:
The exhaust gas flow is redirected from a simple linear path to a multi-dimensional path that utilizes vertical and horizontal spaces within the housing. The fin member redirects gas flow to utilize the full three-dimensional space for cooling, allowing more effective heat dissipation without proportionally increasing device volume
Solution Approach 2:
The exhaust gas is redirected and cooled in the exhaust path forming member before reaching the main trap chamber. This preliminary cooling action prepares the exhaust gas for more effective byproduct entrapment in the subsequent cooling zones, improving overall temperature reduction efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The configuration significantly increases the entrapment efficiency of byproducts, reducing environmental pollution and extending the life of the trap device by effectively trapping and resolidifying exhaust gases.
Implementation Method 1
a cooling jacket configured to cool the fin member
Implementation Method 2
cool the inside of a trap provided in the exhaust system to reduce the temperature of the exhaust gas
Data Source
AI summary
A trap device including an exhaust gas introduction pipe configured to allow an exhaust gas to flow and be led out from an outlet; a fin member provided in a position where the fin member faces the outlet and is hit by the exhaust gas led out from the outlet; an exhaust path forming member covering at least a portion of the exhaust gas introduction pipe and including an exhaust path configured to exhaust the exhaust gas such that the exhaust gas is turned back, via the fin member, in an opposite direction to a direction of flow of the exhaust gas in the exhaust gas introduction pipe; and a cooling jacket configured to cool the fin member is provided. The fin member includes a fin extending in the opposite direction to the direction of the flow of the exhaust gas in the exhaust gas introduction pipe.