Exhaust Valve Sensing for Gap and Tilt Detection in Substrate Processing
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in accurately detecting the gap size and inclination between the gas supplier and stage during high-temperature film formation, which affects processing uniformity and efficiency due to issues with heat resistance and deposition on detection methods.
Innovation Solution
A valve device with a detection part, such as an optical fiber sensor, is integrated into the exhaust path to measure the gap size and inclination by scanning the internal state of the processing container, allowing for precise adjustments to maintain uniform gas flow and pressure control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an endoscope is inserted into the vacuum chamber to observe film formation, then the internal state can be detected, but the detection precision deteriorates due to heat resistance issues and deposition on the detection method
Solution Approach 1:
The patent introduces an intermediary measurement approach by using the mover's position in the exhaust path as a proxy for detecting internal state parameters. Instead of placing detection devices directly in the high-temperature processing environment, the system uses the valve mechanism's positional information to infer gap size and inclination, thereby avoiding direct exposure to thermal and deposition hazards while maintaining measurement capability
Solution Approach 2:
The patent replaces the mechanical/optical endoscope detection system with a positional sensing approach. By detecting the mover's position at different locations in the exhaust path and using this information to calculate internal state parameters, the system substitutes direct optical/mechanical detection with indirect positional measurement, eliminating heat resistance and deposition issues
2Measurement precision
If a detection device is placed inside the processing container, then the internal state can be measured, but the device complexity increases due to heat resistance requirements and deposition protection
Solution Approach 1:
The patent extracts the detection function from the high-temperature processing environment. By placing the detection part in the exhaust path where temperature and deposition are significantly reduced, and using the mover's positional information to infer internal state parameters, the system removes the need for complex heat resistance and deposition protection mechanisms
Solution Approach 2:
The patent makes the valve device multi-functional by integrating detection capability into the existing exhaust path mechanism. The mover, already present for valve operation, is equipped with a detection part that serves dual purposes: controlling the exhaust path and detecting internal state parameters, thereby eliminating the need for separate complex detection systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate detection and adjustment of the gap size and inclination, ensuring consistent processing conditions and enhancing uniformity and efficiency of film formation on substrates.
Implementation Method 1
A valve device with a detection part, such as an optical fiber sensor, is integrated into the exhaust path to measure the gap size and inclination
Data Source
AI summary
A valve device provided in a processing apparatus including a processing container for processing a workpiece, the valve device includes: a valve body including a valve main body configured to open or close an exhaust path connected to an exhaust port that opens into the processing container and a mover provided in the valve main body to move between a first position at the exhaust path and a second position upstream of the first position and outside the exhaust port; and a detector including a detection part provided in the mover to detect an internal state of the processing container while the mover is at the second position.