Exhauster Rotor Temperature Control via Inert Gas
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Solution Overview
Problem
The adhesion of by-products inside the pump in substrate processing apparatuses has become significant due to increased gas exposure, requiring effective temperature control to prevent reaction and maintain pump efficiency.
Innovation Solution
A substrate processing apparatus is equipped with an exhauster, a gas supplier for inert gas, and a controller that anticipates temperature drops during standby periods, using inert gas to maintain the rotor temperature above a target temperature, preventing by-product adhesion and ensuring efficient operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the flow rate of gas flowing into the pump decreases during standby state, then the internal temperature of the pump is lowered, but this causes by-product adhesion inside the pump
Solution Approach 1:
The controller predicts the temperature drop in advance during standby state and activates the gas supplier to supply inert gas before the temperature reaches the critical threshold. This preliminary action prevents by-product adhesion by maintaining temperature above the threshold, rather than waiting for the problem to occur and then responding.
Solution Approach 2:
The gas supplier introduces inert gas into the pump's internal space to create an inert atmosphere. This inert environment prevents chemical reactions and by-product formation that would occur at lower temperatures, thereby preventing adhesion while maintaining the pump in standby state.
2Object-generated harmful factors
If a warm-up operation is performed to raise the internal temperature of the pump, then by-product adhesion is prevented, but the processing time increases
Solution Approach 1:
The system performs preliminary temperature maintenance during standby state by supplying inert gas, so that when processing is needed, the pump is already at the appropriate temperature. This eliminates the need for time-consuming warm-up operations before each processing cycle.
Solution Approach 2:
The pump maintains its own operational temperature during standby periods through automated inert gas supply controlled by the controller, eliminating the need for external warm-up operations and reducing overall processing time.
3Object-generated harmful factors
If the internal temperature of the pump is controlled to prevent by-product reaction, then adhesion is suppressed, but additional gas supply equipment and control systems are required
Solution Approach 1:
Instead of complex active heating systems with multiple sensors and control elements, the invention uses a relatively simple inert gas supply system. The inert gas creates a protective atmosphere that passively prevents by-product formation and adhesion, reducing the complexity of the temperature control system while achieving the same protective effect.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively suppresses by-product adhesion, prolongs the maintenance cycle of the exhauster, and ensures the apparatus remains operational by maintaining the rotor temperature above the target, preventing blockages and maintaining efficiency.
Implementation Method 1
a gas supplier configured to supply an inert gas to the exhauster without passing through a process chamber; and a controller configured to be capable of controlling the gas supplier to supply the inert gas into the casing
Data Source
AI summary
There is provided a technique that includes: an exhauster including a casing in which a rotating body is installed; a gas supplier configured to supply an inert gas to the exhauster without passing through a process chamber; and a controller configured to be capable of controlling the gas supplier to supply the inert gas into the casing based on a temperature drop of the rotating body expected in advance in a state where a processing object is not being processed in the process chamber such that a temperature of the rotating body becomes equal to or higher than a target temperature.