Expanded Housing Powder Collection for Semiconductor Exhaust
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Solution Overview
Problem
Existing powder collection apparatuses in semiconductor manufacturing exhaust gas treatment systems have limited capacity, leading to accumulation of powder in exhaust lines, which can block the flow path and reduce the lifespan of filters and treatment equipment.
Innovation Solution
An apparatus with an expanded housing unit that includes a filter and an adsorption reaction device, featuring a filter installation space and an expansion unit that increases powder collection capacity, along with a suction port for efficient gas flow and two gas supply ports for flexible gas direction, enhancing powder collection and filter lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the housing size is increased to increase powder collection capacity, then the powder collection capacity is improved, but the device complexity and manufacturing cost increase
Solution Approach 1:
The filter body is nested within the housing, and the expansion unit is integrated into the housing structure. The filter installation space is positioned within the housing, creating a compact nested arrangement that maximizes powder collection capacity without proportionally increasing overall device complexity
Solution Approach 2:
The expansion unit extends the housing in a lateral direction (another dimension) rather than simply increasing volume uniformly. This dimensional approach allows the internal space to be expanded effectively while maintaining a manageable external footprint and structural complexity
2Duration of action of moving object
If the filter installation space is increased to extend filter lifespan, then the filter lifespan is improved, but the housing size and manufacturing cost increase
Solution Approach 1:
The housing is segmented into distinct functional spaces: filter installation space, expansion space, and powder collection space. This segmentation allows the filter installation space to be optimized for filter lifespan without requiring the entire housing volume to be excessively large
Solution Approach 2:
The expansion unit extends the filter installation space in a lateral direction, providing additional space for powder accumulation and filter operation without requiring a proportional increase in overall housing volume. This dimensional extension effectively increases filter lifespan while controlling housing size
3Quantity of substance
If powder accumulates in exhaust line, then the powder collection capacity is utilized, but the flow path is blocked and system reliability decreases
Solution Approach 1:
The expansion unit acts as a dedicated powder collection chamber that extracts and isolates accumulated powder from the main exhaust flow path. By providing a separate space for powder accumulation, the system prevents powder from blocking the exhaust line while maintaining reliable gas flow
Solution Approach 2:
The expansion space serves as an intermediary chamber between the filter and the exhaust line outlet. Powder accumulates in this intermediate space rather than in the exhaust line itself, acting as a buffer that protects the flow path from blockages while allowing powder collection to proceed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The expanded housing unit increases powder collection capacity, extends the lifespan of filters and treatment equipment, and improves the efficiency of exhaust gas treatment by allowing more powder to fall due to gravity, thus reducing the frequency of filter replacements.
Implementation Method 1
a filter member which filters the exhaust gas and feeds it to an adsorption reaction device
Implementation Method 2
an adsorption reaction device for treating exhaust gas using an adsorption reaction
Implementation Method 3
the route by which exhaust gas flows in the internal space of the housing increases due to the expanded space within the housing thus increases the quantity of powder falling due to gravity
Data Source
AI summary
An apparatus includes a filter body, which filters an exhaust gas and feeds it to an adsorption reaction device and is disposed below the adsorption reaction device; and a housing which provides an internal space for storing powder separated from the filter body and is installed below the adsorption reaction device, which housing includes a filter installation unit, which is a space projected below the adsorption reaction device and which provides a filter installation space internally for installing the filter body and an expansion unit that protrudes sideways from the filter installation unit and provides an expansion space which communicates internally with the filter installation space, and the internal space is expanded by the expansion space to increase the powder collection capacity. A suction port for sucking in the exhaust gas is installed in the expansion unit.