Expanded Metal Extraction Grid for Thermal Shape Stability
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Solution Overview
Problem
Existing extraction devices for ions and electrons from plasma suffer from longevity issues due to thermal expansion, leading to mechanical deformation and non-uniform distribution of the beam, which affects the stability and homogeneity of the coating process.
Innovation Solution
An extraction device featuring an expanded metal grid with a grid holder that allows for a three-dimensionally curved surface, preferably cylindrical, and includes a clamping ring and spacer to maintain the grid's shape and compensate for thermal expansion, ensuring uniform distribution over time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a metal grid or metal mesh is used to extract ions and electrons from plasma, then the extraction function is achieved, but the grid undergoes thermal expansion during irradiation causing mechanical deformation and non-uniform beam distribution
Solution Approach 1:
The patent changes the physical parameters of the grid by using an expanded metal structure instead of traditional metal mesh. This expanded structure has different thermal expansion characteristics that reduce mechanical deformation during irradiation, maintaining grid shape stability and uniform beam distribution over extended operation periods
Solution Approach 2:
The patent employs a composite structure combining the expanded metal grid with a support framework. This composite design distributes thermal stresses and prevents uniform expansion, thereby maintaining the grid's geometric integrity and extraction performance under thermal load
2Duration of action of stationary object
If a traditional metal mesh grid is used, then ion and electron extraction is achieved, but the longevity of the electrode is impaired by thermal expansion
Solution Approach 1:
The patent modifies the thermal response parameters by using an expanded metal structure with altered thermal expansion coefficients compared to traditional mesh. This structural parameter change reduces the magnitude of thermal deformation, extending electrode operational life under continuous irradiation conditions
Solution Approach 2:
The expanded metal grid consists of segmented interconnected elements rather than a continuous mesh structure. This segmentation allows localized thermal expansion without propagating deformation across the entire grid, thereby maintaining overall structural integrity and extending electrode longevity
3Manufacturing precision
If the grid shape changes due to thermal expansion, then temporary extraction is possible, but the distribution of ions and electrons becomes non-uniform affecting coating properties
Solution Approach 1:
The patent changes the geometric and material parameters of the grid structure to create an expanded metal configuration that exhibits reduced thermal distortion. This parameter modification ensures the grid maintains its shape stability under thermal load, producing uniform ion and electron distribution for consistent coating quality
Solution Approach 2:
The expanded metal grid structure incorporates curved and rounded geometric features rather than sharp angles or straight lines. This curvature design distributes thermal stresses more evenly throughout the structure, preventing localized deformation and maintaining uniform beam extraction characteristics
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves a stable and uniform distribution of ions/electrons over 200 hours of operation, maintaining optimal plasma distribution and layer properties with minimal deformation, enhancing the longevity and homogeneity of the coating process.
Implementation Method 1
The charged particles, i.e., in particular ions or electrons, can be extracted from the plasma with the aid of an electrode
Implementation Method 2
it reduces the erosion rate of the grid by the plasma ion bombardment
Data Source
AI summary
A device for extracting ions and/or electrons from a plasma has a grid (1) and a grid holder (2), on the circumference of which the grid (1) is fastened. According to the invention, the grid (1) is configured as an expanded metal grid. The invention further also provides a plasma source, a plasma coating device, and a method for producing an interference layer or interference layer systems.