Expelling Gas Between Substrate and Mold Using Vacuum
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Solution Overview
Problem
In nano-fabrication processes, the presence of gases between a substrate and a mold can lead to pattern distortion, low fidelity of features, and non-uniform thickness of the residual layer, which are undesirable outcomes.
Innovation Solution
A method and system are developed to expel gases by altering the shape of the template and mold, using a pressure control system to create a vacuum that allows gases to escape, ensuring that the polymeric material fills the desired volume without trapping air, thereby minimizing gas pockets and maintaining pattern integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a template is brought into contact with a substrate in a nano-fabrication process, then pattern transfer is achieved, but gas trapping occurs causing pattern distortion and non-uniform residual layer thickness
Solution Approach 1:
The method applies preliminary action by creating a vacuum condition before the template contacts the substrate. This preliminary vacuum state prevents gas from being trapped during the subsequent contact and pressing process, thereby eliminating the harmful effect of gas pockets that would cause pattern distortion and non-uniform residual layer thickness.
Solution Approach 2:
The patent creates an inert environment by establishing a vacuum between the template and substrate before contact. This vacuum environment replaces the harmful atmospheric gas with a gas-free or low-gas environment, preventing gas trapping during the nano-fabrication process and ensuring high pattern fidelity.
2Productivity
If pressure is applied to bring the template and substrate into full contact, then pattern transfer is completed, but gas pockets are trapped leading to pattern distortion
Solution Approach 1:
The vacuum is applied as a preliminary action before pressure-induced contact between template and substrate. This sequence ensures that when pressure is applied to complete the pattern transfer, no gas pockets are present to be trapped, thus maintaining both productivity and pattern uniformity.
Solution Approach 2:
The method converts the potentially harmful effect of applied pressure (which could trap gas) into a beneficial effect by first creating a vacuum. The same pressure that would normally trap gas is now used to maintain contact in a gas-free environment, ensuring both complete pattern transfer and high uniformity.
3Quantity of substance
If the template and substrate are pressed together to fill the desired volume, then material transfer is achieved, but non-uniform residual layer thickness results due to gas interference
Solution Approach 1:
The vacuum environment serves as an inert atmosphere that eliminates gas interference during material filling. Without gas pockets to compress or trap, the polymeric material can uniformly fill the desired volume between template and substrate, resulting in both complete material transfer and uniform residual layer thickness.
Solution Approach 2:
The vacuum application is a preliminary action that prepares the interface between template and substrate before material filling occurs. This preliminary gas removal ensures that subsequent material pressing results in uniform distribution and thickness, as no gas pockets will disrupt the filling process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents gas trapping, resulting in improved pattern fidelity and uniformity of the residual layer, enhancing the overall quality of nano-fabricated structures.
Implementation Method 1
A method and system of expelling gas positioned between a substrate and a mold... using a pressure control system to create a vacuum that allows gases to escape
Data Source
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AI summary
The present invention is directed towards a method and a system of expelling a gas positioned between a substrate and a mold, the substrate and the mold further having a liquid positioned therebetween.