Wireless Power Transmission for Exposure Apparatus Vibration Isolation
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Solution Overview
Problem
Conventional exposure apparatuses face challenges in maintaining overlay accuracy due to vibration propagation from the floor to the projection optical system, despite vibration isolation methods, as finer patterns in higher-integration semiconductor devices require more precise control and isolation.
Innovation Solution
The exposure apparatus employs a moving magnet type generator with a coil section on a power-supplied member and a drive section on a vibration-separated member, along with signal transmission/reception and piping relay mechanisms, to prevent vibration propagation through electromagnetic induction, signal transmission, and controlled piping alignment, ensuring accurate power supply and signal transmission without degrading exposure accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If wiring or piping is used to connect the holding member and the body, then electric power and signals can be transmitted, but fine vibration from the floor surface is propagated to the projection optical system
Solution Approach 1:
The patent replaces mechanical wiring connections with wireless power transmission technology. The body includes a wireless power transmission unit that transmits power wirelessly to the holding member, eliminating physical wiring that would conduct vibration. This substitution of mechanical connection with electromagnetic field-based power transmission resolves the contradiction by maintaining ease of operation while preventing vibration propagation.
Solution Approach 2:
The patent introduces vibration isolation mechanisms as intermediary elements between the body and the holding member. These intermediaries (vibration isolation units) decouple the mechanical connection, allowing power and control signals to be transmitted while blocking vibration transmission. The intermediary absorbs or dampens vibrational energy, preventing it from reaching the projection optical system.
2Object-affected harmful factors
If the holding member is separated from the body in terms of vibration, then vibration propagation is suppressed, but fine vibration still reaches the projection optical system through wiring or piping
Solution Approach 1:
The patent replaces all mechanical connections (wiring and piping) with wireless power transmission and wireless communication systems. This eliminates the vibration conduction paths that would otherwise transmit fine vibrations from the floor to the projection optical system through the holding member, thereby maintaining exposure accuracy without compromising the vibration separation between body and holding member.
3Object-affected harmful factors
If conventional vibration isolation methods are used, then some vibration is suppressed, but fine vibration propagation cannot be fully prevented for higher-integration semiconductor devices
Solution Approach 1:
The patent employs wireless power transmission technology to completely eliminate mechanical wiring connections between the body and holding member. This radical substitution removes the vibration conduction path entirely, preventing even fine vibrations from reaching the projection optical system. The wireless transmission maintains full power supply capability while achieving superior vibration isolation necessary for higher-integration semiconductor devices with finer patterns.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses vibration-induced errors, maintaining high precision in pattern formation and exposure accuracy by isolating vibrations from the power supply, signal transmission, and piping systems, thereby enhancing the overlay accuracy in semiconductor device manufacturing.
Implementation Method 1
a moving magnet type generator that has a coil section that is mounted on the first member, a magnet section that faces the coil section via a predetermined clearance, and a drive section that drives the magnet section and is mounted on the second member
Data Source
AI summary
Electric power is generated by using a generator equipped with: a coil unit that is arranged on a barrel platform and incorporates coils; and a magnet unit that has a magnet section arranged on a protruding section of a column separated from the barrel platform in terms of vibration and generates an electromotive force in a non-contact state with the coils, and a motor that drives the magnet section, and thus a wiring that supplies electric power to the barrel platform does not have to be used. Accordingly, vibration that has been propagated to the barrel platform through the wiring can be precluded.