Exposure Device Imaging Position Adjustment Module
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional exposure apparatuses for large field of view (FoV) integrated circuits face complexity and maintenance challenges due to spatial dependence of adjustment mechanisms within the objectives, which increases structural complexity and makes repairs and maintenance difficult.
Innovation Solution
The exposure apparatus includes a separate imaging position adjustment module with multiple adjustment elements, each comprising an optical system, motor-based actuation, and control system, allowing for independent adjustment of focal plane, magnification, and translation without affecting the projection objectives, thereby reducing system complexity and improving accessibility for maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If adjustment mechanisms are integrated within the projection objectives to enable imaging position adjustment, then imaging quality and stitching FoV performance are improved, but device complexity and structural complexity increase
Solution Approach 1:
The system is divided into two independent modules: projection objectives for image formation and adjustment mechanisms for position correction. This segmentation allows each module to be optimized independently, reducing the complexity of individual components while maintaining overall system precision.
Solution Approach 2:
The adjustment mechanisms are extracted from the projection objectives and placed in a separate adjustment module. This extraction removes the complexity of integrated adjustment mechanisms from the objectives, simplifying their structure while preserving the ability to adjust imaging positions through the dedicated adjustment module.
2Ease of operation
If motor-based actuation systems are placed within the objectives for driving adjustment mechanisms, then imaging position adjustment is enabled, but ease of repair and maintenance deteriorate
Solution Approach 1:
The motor-based actuation systems are extracted from the projection objectives and relocated to the separate adjustment module. This allows maintenance personnel to access and service the motors without disassembling the complex optical structures of the objectives, significantly improving ease of repair and maintenance.
Solution Approach 2:
The adjustment module serves as an intermediary between the control system and the projection objectives. It houses the motor-based actuation systems in a accessible location, allowing them to drive the adjustment mechanisms indirectly through optical paths without being physically embedded in the objectives, thus maintaining adjustability while improving maintainability.
3Manufacturing precision
If multiple adjustment mechanisms are integrated in stitching objectives to correct imaging deviations, then stitching FoV quality is improved, but internal space constraints and structural tightness increase
Solution Approach 1:
The adjustment functions are segmented from the projection objectives and consolidated in a separate adjustment module. This provides ample space in the adjustment module for multiple adjustment mechanisms without constraining the internal volume of the projection objectives, allowing comprehensive adjustment capabilities while maintaining compact objective design.
Solution Approach 2:
The adjustment mechanisms are relocated to a different spatial dimension - from within the compact objective structures to a separate adjustment module positioned elsewhere in the optical path. This dimensional relocation provides sufficient space for multiple adjustment mechanisms while preserving the compact design of the projection objectives.
Data Source
AI summary
An exposure device is disclosed, including: a light source (1), an illumination module (2), a mask stage (5), a projection objective module, an imaging position adjustment module (4) and a wafer stage (6), disposed sequentially along a direction of light propagation, the imaging position adjustment module (4) including a plurality of adjustment elements (410) arranged individually, the projection objective module including a plurality of projection objectives (3) each having an FoV in positional correspondence with a respective one of the plurality of adjustment elements (410). The imaging position adjustment module (4) ensures satisfactory imaging quality and FoV stitching quality of the projection objectives (3) by performing translation, magnification, focal plane and other adjustments on an image formed by the projection objective module. The projection objective module is simpler as it does not contain any component or mechanism for imaging position adjustment.