Exposure Apparatus Frame Mechanism With Flexible Connections
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Solution Overview
Problem
Conventional exposure apparatuses require extensive assembly and maintenance, and when technology generations change, the entire frame mechanism must be updated, making it inconvenient to reuse previous generation modules.
Innovation Solution
The exposure apparatus is designed without a frame mechanism body, using a pair of frames with an exposure main section comprising high rigidity sections and flexible connection members, allowing for easy assembly and adaptation across different generations without needing to change the base platform.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a frame mechanism body is used to assemble projection optical system, reticle stage system and wafer stage system, then structural stability is improved, but device complexity and maintenance difficulty increase
Solution Approach 1:
The exposure apparatus is divided into independent modules: projection optical system module, reticle stage system module, and wafer stage system module. Each module can be assembled and adjusted separately, then attached to the frame mechanism, reducing overall device complexity while maintaining structural stability.
Solution Approach 2:
The frame mechanism is designed as a universal platform that can accommodate different generations of exposure apparatus modules. The standard interface allows various modules to be attached and detached, enabling the frame to serve multiple functions across different technological generations.
2Manufacturing precision
If the frame mechanism is designed for a specific generation, then exposure accuracy is optimized, but adaptability to other generations decreases
Solution Approach 1:
The frame mechanism incorporates a standard interface design that enables it to support multiple generations of exposure apparatus modules. This universal interface allows the same frame to accommodate different module configurations while maintaining exposure accuracy through precise positioning capabilities.
Solution Approach 2:
The system allows dynamic reconfiguration by enabling the attachment and detachment of different module generations to the frame mechanism. This dynamic adaptability permits optimization for specific generations while maintaining versatility across generations through the standardized interface.
3Ease of repair
If modules are detachably attached to the frame mechanism, then ease of maintenance is improved, but assembly adjustment time increases
Solution Approach 1:
Modules are pre-assembled and pre-adjusted as complete units before being attached to the frame mechanism. This preliminary preparation ensures that when modules need maintenance or replacement, they can be quickly swapped without requiring time-consuming on-site adjustments, thus reducing assembly adjustment time while maintaining ease of maintenance.
4Strength
If rigid connection members are used to connect high rigidity components, then structural strength is improved, but vibration and heat transfer increase
Solution Approach 1:
Flexible connection members are used to connect high rigidity components. These flexible members provide sufficient structural strength while simultaneously isolating vibration and heat transfer between components, thus reducing harmful factors while maintaining necessary structural integrity.
Data Source
AI summary
An exposure apparatus that forms a pattern by exposing a substrate is equipped with a first platform tower, a second platform tower installed at a predetermined distance, and an exposure main section arranged within the space between both platform towers that includes a plurality of high rigidity sections each including a high rigidity component. Accordingly, it becomes possible to use a module (a high rigidity section) of the preceding generation even when the generation changes.