Direct Exposure Apparatus Head Alignment Correction
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Solution Overview
Problem
In direct exposure apparatuses with multiple exposure heads arranged in a two-dimensional manner, positional deviations of exposure heads lead to insufficient light energy delivery, affecting manufacturing accuracy and yield, as existing correction methods are time-consuming and labor-intensive, relying on manual observation and measurement.
Innovation Solution
An automatic correction method using a sensor board with linear light detecting sensors to detect illumination differences between exposure elements, calculating correction amounts to align exposure heads accurately, enabling hardware or software-based adjustments to ensure proper alignment and exposure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual observation and measurement methods are used to correct exposure head positional deviations, then correction can be performed, but the process is time-consuming and labor-intensive
Solution Approach 1:
The patent replaces manual mechanical measurement methods with an automated optical detection system. A sensor board with light detecting sensors detects the illumination positions of exposure elements, and a computer automatically calculates positional deviations and generates correction data, eliminating manual observation and measurement processes
Solution Approach 2:
The system performs self-diagnosis and self-correction through automatic detection of exposure head positions, automatic calculation of deviation amounts, and automatic generation of correction data. The exposure apparatus corrects its own positional deviations without requiring manual intervention or external measurement tools
2Manufacturing precision
If manual correction methods are used, then exposure head alignment can be adjusted, but manufacturing accuracy and yield are affected due to time loss
Solution Approach 1:
The patent performs preliminary detection of exposure head positions and calculation of correction data before actual exposure processes. The sensor board detects illumination positions, the computer calculates positional deviations and generates correction data in advance, allowing corrections to be applied automatically during or after exposure without delaying production
Solution Approach 2:
The system establishes a feedback loop where the sensor board detects actual exposure head positions, the computer compares these with expected positions to calculate deviations, generates correction data, and the exposure apparatus applies corrections. This closed-loop feedback ensures continuous improvement of alignment accuracy without manual intervention
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for efficient and automated correction of exposure head positional deviations, ensuring sufficient light energy delivery and improving manufacturing accuracy and yield by processing exposure data in real-time, reducing manual intervention and costs.
Implementation Method 1
a detection step of detecting the illumination of the two exposure elements by using a sensor board that is moved, on the side where the exposure heads are illuminated
Data Source
AI summary
An automatic correction method for a direct exposure apparatus illuminates two exposure elements, which are included in adjacent exposure heads separately and which are to expose an identical line on an exposure target, among exposure elements arranged in a two-dimensional manner with an inclination of relative movement of an exposure target in a plurality of exposure heads arranged in the direction of the relative movement of the exposure target; detects the illumination of the two exposure elements by using a sensor board (11) that is moved, on the side where the exposure heads are illuminated, in the direction in which the exposure heads are arranged; and calculates correction amounts for correcting so that the two exposure elements can expose the identical line mentioned above, based on a detection result of the illumination of the exposure elements by the sensor board (11).