Digital Exposure Control Adjusting Scan Speeds for Display Homogeneity
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Solution Overview
Problem
Current digital exposure machines face issues with display Mura and excessive tact time, leading to reduced yield and productivity due to differences in optical devices and scan speeds, resulting in uneven light and shade patterns and inefficient exposure processes.
Innovation Solution
A digital exposure control method and apparatus that adjust scan speeds for different types of functional areas on a substrate, using multiple full-page scans with varying speeds to ensure exposure homogeneity and efficiency, and employing techniques like rasterization processing, guidance boxes, and micromirror reuse to improve exposure quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If uniform scan speed is used for all functional areas, then the exposure process is simple, but display homogeneity deteriorates due to optical device differences
Solution Approach 1:
The patent applies local quality by differentiating scan speeds for different functional areas (display area vs. non-display area). The display area uses a first scan speed optimized for quality, while the non-display area uses a second scan speed, allowing each region to receive appropriate exposure parameters for its specific requirements and resolving the homogeneity issue without uniformly complicating the entire exposure process
2Manufacturing precision
If multiple full-page scans are performed, then exposure homogeneity improves, but tact time increases
Solution Approach 1:
The patent segments the substrate into display area and non-display area, performing multiple full-page scans selectively. The display area undergoes multiple scans to ensure homogeneity, while the non-display area is exposed in a single pass, thereby achieving exposure homogeneity where needed without unnecessarily increasing tact time across the entire substrate
3Productivity
If scan speed is increased for non-display area, then productivity improves, but exposure quality deteriorates
Solution Approach 1:
The patent implements local quality by assigning different scan speeds to different regions: the display area uses a slower first scan speed to maintain high exposure quality and homogeneity, while the non-display area uses a faster second scan speed to maximize productivity. This regional differentiation allows the system to optimize for quality where it matters and for speed where it doesn't, resolving the contradiction between productivity and quality
Data Source
AI summary
Provided is a digital exposure control method, including: performing exposure of different types of functional areas of a substrate to be exposed through one or a plurality of full-page scans, wherein scan speeds for different types of functional areas of the substrate to be exposed are different.