Liquid Immersion Exposure Shutter Segmentation for Pollution Control

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Solution Overview

Problem

Conventional liquid immersion exposure apparatuses face issues with shutter member deterioration and pollution, leading to potential liquid leakage and reduced exposure accuracy, necessitating frequent maintenance and decreased operational efficiency.

Innovation Solution

The exposure apparatus incorporates a movable body with holding devices to releasably hold cover members, allowing for the exchange of cover members to maintain a clean liquid-retaining space between the optical member and the substrate, thereby preventing performance deterioration and maintaining operational efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a shutter member is used to retain liquid between the shutter member and the light exit surface, then the liquid-retaining space is formed, but the shutter member deteriorates and gets polluted, leading to liquid leakage and projection optical system pollution

Engineering Contradiction:

Improveliquid retention reliabilityVSAvoidshutter member pollution

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The shutter member is divided into a cap member and a seal member. The cap member forms the liquid-retaining space while the seal member prevents liquid leakage at the interface between the cap member and the projection optical system. This segmentation allows the seal member to be replaced independently when polluted, without replacing the entire shutter member.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The seal member is designed to be replaceable when it becomes polluted or deteriorated. The holding device can release and replace the seal member while the cap member remains in position, allowing the seal member to be discarded and recovered/replaced without wasting the entire shutter member assembly.

Inventive Principle:

Principle #34Discarding and recovering

2Productivity

If the shutter member is continuously used while deteriorated and polluted, then operation continuity is maintained, but liquid leakage and projection optical system pollution occur, deteriorating exposure accuracy

Engineering Contradiction:

Improveoperation continuityVSAvoidexposure accuracy

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The holding device can dynamically adjust between holding and releasing the seal member. This dynamic capability allows the seal member to be replaced during operation when pollution is detected, maintaining exposure accuracy without interrupting overall productivity significantly.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system includes detection means that automatically detects pollution of the seal member and triggers replacement. This self-service mechanism ensures exposure accuracy is maintained by proactively replacing polluted components before they cause defects.

Inventive Principle:

Principle #25Self-service

3Manufacturing precision

If frequent maintenance operations are performed to address shutter member pollution and liquid leakage, then exposure accuracy is maintained, but the working rate of the exposure apparatus is lowered

Engineering Contradiction:

Improveexposure accuracyVSAvoidworking rate

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

By segmenting the shutter member into replaceable seal member and stationary cap member, maintenance is simplified to only replacing the seal member when needed, rather than performing extensive maintenance on the entire shutter member assembly, thus preserving working rate.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The seal member is designed for quick replacement when polluted, allowing rapid maintenance operations that minimize interruption to the working rate while ensuring exposure accuracy is maintained through timely replacement.

Inventive Principle:

Principle #34Discarding and recovering

4Device complexity

If a single cover member is used to form the liquid-retaining space, then device complexity is reduced, but the cover member deteriorates and requires frequent replacement, lowering operational efficiency

Engineering Contradiction:

Improvecover member structureVSAvoidoperational efficiency

Core Design Contradiction:

Device complexityVSProductivity

Solution Approach 1:

The cover member (shutter member) is segmented into a cap member that forms the liquid-retaining space and a seal member that prevents leakage. This segmentation allows the durable cap member to remain while only the consumable seal member is replaced, maintaining operational efficiency without excessive complexity.

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS8013975B2Exposure apparatus, exposure method, and method for producing device

Publication Date: 2011.09.06 NIKON CORP

AI summary

An exposure apparatus includes: a first optical member via which an exposure beam exits; a first movable body movable while holding a substrate in a predetermined area; a first holding device releasably holding a first cover member, capable of forming a space retaining a liquid between the first optical member and the first cover member, such that when the first movable body is away from the first optical member, the first cover member is arranged at the position opposite to the exit surface of the first optical member; a second holding device arranged on the first movable body and capable of holding the first cover member released from the first holding device; and a third holding device arranged on the first movable body and releasably holding a second cover member. Deterioration of the performance due to the cover member can be suppressed while suppressing operating rate deterioration.