Exposure Stage Elastic Support for High-Accuracy Large-Plate Positioning
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Solution Overview
Problem
The challenge of improving positioning accuracy in scan type exposure apparatuses arises with the increase in size of the basal plate to be exposed and the increase in definition of the drawing pattern, necessitating enhanced stage positioning systems.
Innovation Solution
A stage apparatus with a movable body supported by an elastically deformable support mechanism, where the angle between support surfaces is adjustable by a drive unit, allowing the support mechanism to deform and change thickness distribution to maintain precise positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the size of the basal plate is increased to expose larger areas, then the coverage area is improved, but the positioning accuracy deteriorates due to increased stage size and reduced control precision
Solution Approach 1:
The support mechanism is divided into multiple independent support portions (first support portion, second support portion, third support portion) that can deform independently. Each support portion has specific elastic deformation characteristics that allow localized thickness changes, enabling precise control of the movable body's position and orientation even when the overall basal plate size is large.
Solution Approach 2:
Different support portions are designed with different elastic deformation characteristics to achieve specific local functions. For example, the first support portion has thickness that varies in the first direction to control positioning in that direction, while the second support portion has thickness that varies in the second direction. This local differentiation of support properties maintains positioning accuracy across the entire large basal plate.
2Manufacturing precision
If the definition of the drawing pattern is increased to improve pattern precision, then the pattern quality is improved, but the stage positioning requirements become more stringent and harder to maintain
Solution Approach 1:
The elastic deformation characteristics of the support portions are carefully designed with specific thickness variations to provide the necessary positioning precision for high-definition patterning. By optimizing the thickness parameters of each support portion, the system achieves the required positioning accuracy without requiring overly complex control mechanisms.
3Stability of the object's composition
If the support mechanism is made rigid to maintain stable positioning, then the positioning stability is improved, but the ability to adapt to angle changes and reduce disturbance transmission deteriorates
Solution Approach 1:
The support mechanism transitions from a rigid structure to a dynamic elastic structure. The support portions are designed with specific elastic deformation characteristics that allow them to flexibly adapt to angle changes between the first and second support surfaces. This dynamic capability enables the system to maintain positioning stability while accommodating necessary movements and reducing disturbance transmission.
Solution Approach 2:
The elastic deformation characteristics of the support portions are optimized to provide appropriate stiffness in different directions. The thickness variations in each support portion create directional elastic properties that allow the system to be rigid enough for stable positioning while remaining flexible enough to adapt to angle changes and absorb disturbances.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the positioning accuracy and controllability of the stage apparatus, reducing disturbance transmission and improving the alignment of patterns on larger basal plates.
Implementation Method 1
the support portion elastically deforms so that the predetermined thickness at a first side where an interval between the first support surface and the second support surface is narrow becomes small and the predetermined thickness at a second side where the interval between the first support surface and the second support surface is wide becomes large in accordance with a change in the angle caused by the drive unit
Implementation Method 2
a support portion that applies an upward force in a direction of gravity to a second support surface different from the first support surface to support the movable body
Data Source
AI summary
A stage apparatus includes a movable body having a first support surface for supporting an object, a support portion that is elastically deformable, has a predetermined thickness, and supports the movable body, a support device having a second support surface that supports the support portion, and a drive unit configured to move the movable body so that an angle between the first support surface and the second support surface is changed, wherein the support portion elastically deforms so that the predetermined thickness at a first side where an interval between the first support surface and the second support surface is narrow becomes small and the predetermined thickness at a second side where the interval between the first support surface and the second support surface is wide becomes large in accordance with a change in the angle caused by the drive unit to support the movable body.