Exposure Stage Motion Profiles for Variable Shot Region Scanning
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Solution Overview
Problem
Conventional exposure apparatuses use a single driving profile for all shot regions on a substrate, which is optimized for the largest shot size, neglecting the varying sizes of other shot regions, leading to suboptimal productivity.
Innovation Solution
An exposure apparatus that adjusts the driving profile for each shot region based on its size, using a combination of first and second acceleration profiles, optimized for both non-exposure and exposure sections, to improve scanning efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single driving profile optimized for the largest shot size is used for all shot regions, then the exposure of large shot regions can be performed efficiently, but the driving time cannot be further reduced for smaller shot regions, limiting overall productivity improvement
Solution Approach 1:
The patent applies local quality by determining different driving profiles for different shot regions based on their individual sizes. Instead of using a uniform driving profile optimized for the largest shot region across the entire substrate, the control unit selects or generates driving profiles tailored to each shot region's dimensions. This allows smaller shot regions to use driving profiles with shorter driving times, while larger shot regions use profiles optimized for their size, thereby reducing overall driving time and improving productivity without compromising exposure quality.
2Loss of time
If the driving profile is optimized for each shot region size, then the driving time can be reduced for smaller shot regions, but the system complexity increases due to multiple acceleration profiles
Solution Approach 1:
The patent implements parameter changes by varying the acceleration and deceleration parameters of the driving profile according to shot region size. The control unit adjusts acceleration rates, deceleration rates, and timing parameters based on the dimensions of each shot region. This allows the system to optimize driving time for each region by changing motion parameters dynamically, achieving reduced driving times without requiring completely separate control systems for each region.
Solution Approach 2:
The patent applies dynamics by making the driving profile adaptive and variable rather than static and uniform. The control unit dynamically selects or generates appropriate driving profiles for each shot region based on real-time information about shot region sizes. This dynamic approach allows the system to respond to varying shot region characteristics, optimizing performance for each region while maintaining a unified control architecture that manages the variability efficiently.
Data Source
AI summary
An exposure apparatus for exposing a plurality of shot regions on a substrate, including a stage configured to hold and drive the substrate, and a control unit configured to control driving of the stage based on a driving profile that defines the driving of the stage, wherein the driving profile is formed by connecting a first acceleration profile that controls acceleration/deceleration of the stage in a non-exposure section that does not include an exposure section where the shot region is exposed and a second acceleration profile that controls the acceleration/deceleration of the stage in the exposure section, the second acceleration profile is formed by a curve, and the control unit determines the first acceleration profile and the second acceleration profile for each of the plurality of shot regions based on information about a size of the shot region.