Extendable Arm Wafer Scanning System
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Solution Overview
Problem
Existing wafer scanning systems require complex mechanisms and high power consumption due to the need to move heavy loads and increased distances as wafer diameters grow, leading to increased costs and inefficiencies.
Innovation Solution
A system utilizing an extendable/retractable arm with a holding apparatus fixed on a specific portion, allowing the arm to be adjusted in length without relative motion, reducing the load moved and power consumption, and incorporating a driving apparatus located at the arm's terminal to simplify the mechanism and lower costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the driving apparatus moves along the arm to scan the wafer surface, then the wafer can be scanned uniformly, but the power consumption increases and the mechanism becomes more complicated
Solution Approach 1:
Instead of moving the driving apparatus along the arm to scan the wafer, the patent inverts the approach by keeping the driving apparatus stationary and moving the arm with the wafer holder along the arm. This inversion reduces power consumption while maintaining uniform scanning capability.
Solution Approach 2:
The patent segments the scanning function into two independent parts: the driving apparatus remains stationary while the arm assembly (containing the wafer holder) performs the scanning motion. This segmentation allows the heavy load to be moved only once to the arm's terminal rather than continuously along the arm.
2Area of stationary object
If the driving apparatus moves along the arm with increased wafer diameter, then the scanning coverage is maintained, but the moving distance increases and power consumption rises
Solution Approach 1:
The patent inverts the scanning approach by having the arm assembly move along the stationary driving apparatus rather than moving the driving apparatus along the arm. This allows the scanning coverage to adapt to larger wafer diameters without increasing the power consumption associated with moving heavy loads over longer distances.
3Ease of operation
If multiple driving apparatuses are used to move the plate and arm, then the wafer can be positioned and scanned, but the mechanism complexity and cost increase
Solution Approach 1:
The patent merges the positioning and scanning functions into a single arm assembly that moves along the stationary driving apparatus. This eliminates the need for separate driving apparatuses for the plate and arm, reducing mechanism complexity while maintaining ease of operation.
Solution Approach 2:
The stationary driving apparatus serves multiple functions: it provides the scanning motion for the arm assembly, positions the wafer holder, and maintains the arm at the optimal terminal position. This multi-functionality reduces the need for additional specialized components.
Data Source
AI summary
A system and a method for moving a wafer during scanning the wafer by an ion beam. The proposed system includes an extendable/retractable arm, a holding apparatus and a driving apparatus. At least a length of the extendable/retractable arm is adjustable. The holding apparatus is capable of holding a wafer and is fixed on a specific portion of the extendable/retractable arm. Furthermore, the driving apparatus is capable of extending and/or retracting the extendable/retractable arm, such that the holding apparatus is moved together with the specific portion. In addition, the proposed method includes the following steps. First, hold the wafer by a holding apparatus fixed on a specific portion of an extendable/retractable arm. After that, adjust a length of the extendable/retractable. Therefore, the holding apparatus, i.e. the wafer, can be moved by the extension/retraction of the extendable/retractable arm.