Remote EUV Light Source Inspection with Extendable Camera
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Solution Overview
Problem
Existing EUV light source inspection methods require physical entry into a narrow, environmentally controlled chamber, exposing operators to potential hazards and causing discomfort due to the need for protective gear and manual camera handling.
Innovation Solution
A remotely operated inspection apparatus with a selectively extendable and retractable mechanical linkage and a camera, controlled by actuators, allows safe and convenient inspection of EUV light source interiors from outside the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If operators physically enter the narrow environmentally controlled chamber to perform inspection, then direct visual inspection of components can be conducted, but operator safety is compromised due to exposure to potential hazards and discomfort from protective gear requirements
Solution Approach 1:
A remotely operated inspection apparatus is introduced as an intermediary device between the operator and the hazardous chamber environment. The apparatus includes a camera mounted on an extendable mechanical linkage that can be positioned inside the chamber without requiring operator entry. The operator controls the apparatus remotely from outside the chamber, eliminating direct exposure to hazards while maintaining inspection capability.
Solution Approach 2:
The manual mechanical inspection method (operator entering chamber with camera) is replaced with an automated remote inspection system. The mechanical linkage with camera is controlled by actuators (electrical/motor-driven) that extend and reposition the camera to various locations inside the chamber, substituting human physical presence with automated mechanical positioning and optical detection.
2Reliability
If a remote inspection apparatus with extendable mechanical linkage is used, then operator safety is improved by eliminating chamber entry, but device complexity increases due to actuators and mechanical components
Solution Approach 1:
The inspection apparatus is designed to perform multiple functions: the mechanical linkage serves both as a positioning mechanism for the camera and as a means to reach various inspection points within the chamber. The camera system can capture images from multiple positions and angles. The actuators provide both extension/retraction motion and positioning capability, consolidating multiple functions into integrated components.
Solution Approach 2:
Instead of requiring the operator to physically be in the chamber, the apparatus creates an optical copy (image) of the chamber interior and components. The camera captures visual information that is transmitted to the operator, allowing remote observation and inspection without physical presence, thereby simplifying the operator's interaction with the system.
3Productivity
If manual camera handling is required in the chamber, then inspection can be performed, but productivity decreases due to operator discomfort and time required for donning protective gear
Solution Approach 1:
The inspection apparatus is pre-positioned and prepared outside the chamber before inspection begins. The mechanical linkage and camera are ready for operation, eliminating the need for operators to don protective gear and manually position equipment inside the chamber. The system can be quickly deployed and operated remotely, reducing preparation time and improving inspection efficiency.
Solution Approach 2:
The inspection apparatus performs the inspection task autonomously under remote control, without requiring operator presence in the chamber. The actuators automatically position the camera, and the system captures images independently, eliminating the time operators would spend navigating the chamber, positioning themselves, and manually operating equipment while wearing protective gear.
Data Source
AI summary
A method for inspecting an extreme ultraviolet (EUV) light source includes: removing a collector mirror of the EUV light source from a collector chamber; installing an inspection apparatus within the collector chamber, the apparatus including a selectively extendable and retractable member and a camera at one end of the member; operating a first actuator to extend the member along a path through the interior chamber of the EUV light source, thereby moving the camera to a given position within the interior chamber of the EUV light source; operating a second actuator to pan the camera about an axis of rotation, thereby establishing a given camera orientation within the interior of the EUV light source; and, capturing an image of the interior chamber of the EUV light source with the camera while the camera is at the given position and orientation established by the operation of the first and second actuators.