External-Actuated Micromechanical Resonator for Large MEMS Scan Angles
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Solution Overview
Problem
Conventional micromechanical resonators suffer from limited actuation energy, resulting in short scan angles, high power consumption, slow start-up time, and high manufacturing costs, with internal actuation methods being inefficient.
Innovation Solution
A micromechanical resonator assembly with an external actuator that transfers high actuation energy to the oscillation body, enabling extremely large scan angles of 110° to 180° and fast start-up times of less than 1 second, while reducing power consumption and manufacturing costs through semiconductor assembly processes and robust mounting techniques.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If internal actuation methods (piezo-electric thin film layers, electrostatic comb drives, or magnetic force stimulation) are used in conventional micromechanical resonators, then the device structure is compact and integrated, but the actuation energy is limited resulting in short scan angles
Solution Approach 1:
The patent introduces an external actuator as an intermediary component that couples to the oscillation body through a mounting base. This external actuator serves as a mediator that transfers mechanical energy from the oscillation body to the MEMS mirrors, enabling larger scan angles without requiring higher actuation energy from the internal actuator. The coupling mechanism allows the oscillation body to drive the external actuator, which then propels the mirrors over longer distances.
2Power
If internal actuation methods are used in conventional micromechanical resonators, then the device structure is simplified, but power consumption is high and start-up time is slow
Solution Approach 1:
The patent employs dynamic operation by utilizing the natural oscillation of the oscillation body at its eigen frequency. The external actuator is designed to couple with this oscillating motion, converting the periodic mechanical energy into sustained mirror actuation. This dynamic approach allows the system to operate efficiently with lower power consumption while achieving fast start-up times by leveraging the inherent oscillatory behavior of the system rather than requiring continuous high-power input.
3Reliability
If externally actuating conventional MEMS mirrors is performed, then actuation geometry may be improved, but optimal actuation geometry is not achieved resulting in unsatisfactory performance
Solution Approach 1:
The patent segments the actuation function into two distinct components: the internal actuator that generates initial oscillation and the external actuator that amplifies and transfers this motion to the mirrors. This segmentation allows each component to be optimized for its specific function - the internal actuator for compact integration and the external actuator for efficient energy transfer and large scan angle achievement. The mounting base provides the coupling interface between these segmented components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The assembly achieves large scan angles, fast start-up times, and low power consumption, with cost-effective manufacturing, making it suitable for applications like laser projection and scanning systems.
Implementation Method 1
an oscillation body configured to oscillate about one or more axes, the oscillation body having one or more eigen frequencies
Implementation Method 2
The internal actuator being mounted with the external actuator so as to form a coupled oscillation system. The external actuator being mounted on the mounting base and being electrically connected to the electronic driving part, for allowing excitation of the oscillation body of the internal actuator by transfer of energy from the oscillating part to the oscillation body
Data Source
Figure 1A~1B
Figure 1C~1D
Figure 2
AI summary
A micromechanical resonator assembly which includes an internal actuator. The internal actuator further includes an oscillation body configured to oscillate about one or more axes, the oscillation body having one or more eigen frequencies. The micromechanical resonator assembly further includes an external actuator that includes an oscillating part. The micromechanical resonator assembly further includes a mounting base that includes electronic driving part. The external actuator being mounted on the mounting base and being electrically connected to the electronic driving part, for allowing excitation of the oscillation body of the internal actuator by transfer of energy from the oscillating part to the oscillating body. The micromechanical resonator assembly provides external actuation of the oscillation body of the internal actuator by use of the external actuator and hence, provides extremely large scan angles of 180°.