External Charged Particle-Optical Element for Faster Beam Alignment
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Solution Overview
Problem
Existing alignment processes for charged particle-optical devices are manual, time-consuming, and require specialized personnel, reducing productivity and increasing costs due to the need for long downtimes during adjustments.
Innovation Solution
A charged particle-optical device with an actuatable charged particle-optical element located outside the vacuum chamber, allowing for automated alignment of primary beams relative to the beam path, enabling quicker and more efficient adjustments without the need for manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual alignment processes are used for charged particle-optical devices, then alignment accuracy can be achieved, but alignment time and system downtime increase significantly
Solution Approach 1:
The system performs self-alignment by automatically measuring beam positions and actuating elements to correct misalignments without requiring manual intervention. The automated alignment process enables the system to correct its own positioning errors, reducing both alignment time and operational downtime while maintaining accuracy through continuous measurement and adjustment cycles.
Solution Approach 2:
Manual mechanical alignment operations are replaced by an automated control system that uses measurement data to drive actuators. The system substitutes human-operated mechanical adjustments with automated feedback control, where sensors measure beam positions and controllers actuate elements to achieve alignment, thereby eliminating the time loss associated with manual procedures.
2Measurement precision
If manual alignment adjustments are performed, then alignment can be achieved, but productivity and throughput are reduced due to long downtimes
Solution Approach 1:
The automated alignment system enables rapid self-correction of misalignments during operation or between production runs. By eliminating the need for manual intervention and reducing system downtime, the self-aligning capability maintains high alignment precision while significantly improving manufacturing throughput and overall productivity.
Solution Approach 2:
The system maintains continuous operational readiness through automated alignment capabilities that can quickly correct misalignments without requiring prolonged system shutdowns. This continuity ensures that production flows remain uninterrupted, preserving both alignment precision and manufacturing throughput.
3Measurement precision
If specialized personnel perform alignment adjustments, then accurate alignment can be achieved, but operational costs increase
Solution Approach 1:
The automated alignment system eliminates the need for specialized personnel to perform manual alignment adjustments. By incorporating measurement and actuation capabilities directly into the device, the system performs self-alignment automatically, thereby reducing labor costs and operational expenses while maintaining high alignment accuracy through programmed control algorithms.
Solution Approach 2:
Manual alignment operations requiring specialized personnel are replaced by an automated control system that integrates measurement sensors and actuators. This substitution eliminates the need for human operators, reducing operational costs while preserving alignment accuracy through automated feedback control and precision actuation mechanisms.
Data Source
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AI summary
The present disclosure relates to a module 61 for a charged particle-optical device 40 configured to direct one or more primary beams 202 of charged particles toward a sample location along a beam path, the module comprising: a wall for a vacuum chamber; and an actuatable charged particle-optical element 270 configured to operate on charged particles directed along the beam path towards the sample location; wherein the actuatable charged particle-optical element is configured to be located outside the wall for the vacuum chamber and to be actuatable relative to the beam path in a direction across the primary beam and/or about an axis 205 across the primary beam.