Temperature control medium processing apparatus and temperature control medium processing method
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Solution Overview
Problem
Conventional chillers used in semiconductor processing face a trade-off between downsizing and maintaining processing performance, as the need to collect and refill coolant leads to increased size due to the presence of collection tanks, and there is a requirement for improved coolant processing performance.
Innovation Solution
A temperature control medium processing apparatus that includes a tank for storing coolant, inlet and outlet paths connected to the chiller module, and a pump to facilitate the collection and refilling of coolant, allowing for downsizing of the chiller module while maintaining processing performance by externalizing the coolant storage and using a movable coolant processing apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a collection tank is added to collect and refill coolant, then coolant processing performance is improved, but the chiller size increases
Solution Approach 1:
The collection tank is extracted from the chiller system and placed as a separate external apparatus. The chiller module now only contains the cooling mechanism, while the tank is a standalone unit that can be connected via hoses, allowing coolant collection and refilling without increasing chiller size
Solution Approach 2:
The system is segmented into two independent components: the chiller module (cooling function) and the collection tank apparatus (storage and refilling function). This segmentation allows each component to be optimized independently, with the chiller remaining compact and the tank providing the necessary coolant processing capacity
2Volume of stationary object
If the chiller module is downsized, then device footprint is reduced, but coolant collection and refilling capability is compromised
Solution Approach 1:
The coolant storage and refilling functions are extracted from the chiller module and transferred to an external collection tank apparatus, enabling the chiller to be downsized while maintaining full coolant processing capability through the separate tank system
Solution Approach 2:
Hoses and connectors act as intermediaries between the downsized chiller module and the external collection tank, enabling coolant transfer and refilling operations without requiring the tank to be integrated into the chiller structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the downsizing of the chiller module while ensuring effective coolant collection and refilling, reducing the footprint and operational time, and preventing coolant leaks, thus maintaining processing performance and safety.
Implementation Method 1
a pump provided at the outlet path, and configured to force the temperature control medium stored in the tank to flow out
Implementation Method 2
a temperature control medium processing apparatus configured to collect a temperature control medium from a module using the temperature control medium or refill the module with the temperature control medium
Data Source
AI summary
A temperature control medium processing apparatus configured to collect a temperature control medium from a module using the temperature control medium or refill the module with the temperature control medium includes a tank configured to store the temperature control medium therein; a first inlet path which is connected to a first inlet opening of the tank, and through which the temperature control medium is introduced; an inlet connector configured to connect the first inlet path and a path from the module; an outlet path which is connected to an outlet opening of the tank, and through which the temperature control medium flows out; an outlet connector configured to connect the outlet path and a path to the module; and a pump provided at the outlet path, and configured to force the temperature control medium stored in the tank to flow out.