External Passive Getter Module for Wafer Container Contaminant Control
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Solution Overview
Problem
Semiconductor wafer and reticle substrates are vulnerable to contaminants like moisture, VOCs, and particles during storage and shipping, leading to defects and reduced yield, as existing getter systems require disassembly for cleaning and may not fit within container space constraints.
Innovation Solution
A semiconductor wafer container assembly with an externally mounted passive getter module, positioned outside active purge flow paths, that can be easily accessed and replaced without opening the container, using a rigid connection structure and optional filter to control contaminant levels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If getters are placed inside the container, then contaminant control is improved, but device complexity and cleaning difficulty increase due to required disassembly
Solution Approach 1:
The getter module is extracted from the internal container space and mounted on the external surface of the container. This allows the getter to remain effective in controlling contaminants while eliminating the need to disassemble container components for cleaning access, as the external module can be serviced independently of the container's internal structure.
Solution Approach 2:
A mounting structure with sealing interface acts as an intermediary between the container and the getter module. This intermediary component provides a sealed connection that allows the getter to function internally while being accessible from the external surface, resolving the conflict between internal placement benefits and cleaning accessibility.
2Productivity
If container space is maximized for wafer storage, then productivity is improved, but getter placement options are limited
Solution Approach 1:
The getter module is relocated from the two-dimensional internal container space to the external surface of the container. This dimensional shift allows the getter to be positioned on the outer surface where space is abundant, thereby maximizing internal wafer storage capacity while maintaining getter functionality through external mounting structures.
3Ease of repair
If getters are exposed to the external environment, then ease of maintenance is improved, but contaminant control effectiveness may be reduced
Solution Approach 1:
A sealing interface or barrier acts as an intermediary between the external environment and the getter module. This seal allows the getter to be mounted externally for easy maintenance access while preventing direct exposure to environmental contaminants, thereby maintaining contaminant control effectiveness equivalent to internal placement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces contaminant concentrations within the container microenvironment, increasing wafer yield and protecting substrates from moisture, oxygen, and other contaminants, while allowing for flexible placement and easy maintenance of the getter modules, applicable to various substrate sizes and industries.
Implementation Method 1
Getter material is disposed within the housing, the getter material adapted to decrease concentration of contaminants within the wafer storage area of the container
Data Source
AI summary
A semiconductor wafer container assembly includes a container defining an exterior and defining an interior having a wafer storage area adapted to support one or more semiconductor wafers. The container also defines an opening in the container between the exterior and the interior. The container has a door and a latching mechanism to sealingly secure the door closed, and the door is openable for access to the wafer storage area. A passive getter module is removably secured with respect to the exterior of the container by substantially rigid connection structure that is a part of or extends from substantially rigid getter module housing. Getter material is disposed within the housing to decrease concentration of contaminants within the wafer storage area of the container via the access opening and the opening in the container.