External Silicon Re-Feeding for Continuous Monocrystal Pulling

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Solution Overview

Problem

Conventional silicon monocrystal production processes require extensive preliminary work after crystal pulling, leading to time wastage and inefficiencies, and internal re-feeding methods cannot supplement large amounts of raw materials without risking sputtering during the feeding process.

Innovation Solution

An external re-feeding apparatus is used, comprising a storage and a feeder, where the feeder's discharging end is movable and immersible in the silicon melt, allowing raw materials to be melted and re-fed externally, avoiding direct impact on the quartz crucible and sputtering.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional furnace cooling and cleaning processes are performed between production cycles, then the furnace is prepared for next production, but a lot of time is wasted for complicated preliminary work

Engineering Contradiction:
Improvefurnace preparation completenessVSAvoidproduction cycle time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent applies preliminary action by performing material melting and preparation in advance during the crystal pulling process. The feeder continuously feeds silicon materials into the crucible, and the materials are pre-melted before the next production cycle begins, eliminating the need for time-consuming cooling and cleaning operations between cycles.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements continuity of useful action through the external feeder system that operates continuously during crystal pulling. The feeder maintains a steady supply of silicon materials to the crucible, ensuring the melting process never stops, thereby eliminating idle time between production cycles and maintaining continuous productive operation.

Inventive Principle:
Principle #20Continuity of useful action

2Quantity of substance

If internal re-feeding device is used to supplement raw materials, then some material supplementation is achieved, but a large amount of raw materials cannot be supplemented and sputtering of silicon solution may occur

Engineering Contradiction:
Improveraw material supplementation capacityVSAvoidsilicon solution sputtering
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

The patent applies the extraction principle by removing the feeder from the furnace interior and placing it externally. This separates the material feeding function from the crucible environment, allowing large quantities of materials to be fed without causing sputtering of the silicon solution. The external positioning eliminates the harmful interaction between feeding operations and the molten silicon.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent uses the external feeder as an intermediary device between the material storage and the crucible. The feeder delivers materials to the crucible through a controlled interface, preventing direct contact between the feeding mechanism and the silicon solution, thereby avoiding sputtering while enabling continuous material supplementation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus enables continuous material feeding, reduces downtime, and prevents sputtering, maintaining the integrity of the quartz crucible and ensuring efficient monocrystal production.

Implementation Method 1

the discharging end of the feeder is movable relative to the monocrystal furnace so that the discharging end of the feeder is immersed in a silicon melt during re-feeding of raw materials, and the raw materials are melted and re-fed

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentUS12630940B2Raw material re-feeding apparatus for manufacturing monocrystal and monocrystal manufacturing apparatus having the same
Publication Date: 2026.05.19 TIANJIN ZHONGHUAN SEMICON CO LTD
  • US12630940B2 patent drawing
  • US12630940B2 patent drawing
  • US12630940B2 patent drawing

AI summary

The present disclosure provides raw material re-feeding apparatus for manufacturing a monocrystal and monocrystal manufacturing apparatus including the same. The raw material re-feeding apparatus is provided outside a monocrystal furnace and includes a storage and a feeder in communication with the storage. A discharging end of the feeder is located in the monocrystal furnace and movable relative to the monocrystal furnace, so that the discharging end of the feeder is immersed in a silicon melt when the material re-feeding is performed, and thus the material is melted and re-fed.