External Source Positioning for High-Temperature Charged Particle Guns
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Solution Overview
Problem
Existing charged particle beam apparatuses face challenges in achieving precise position adjustment of the charged particle source due to limitations in positioning accuracy and temperature restrictions during degassing processes, particularly in short focus type or magnetic field superposition type guns, which affect the alignment and resolution of the beam.
Innovation Solution
A moving mechanism is implemented outside the vacuum chamber to adjust the charged particle source support member in XYZ directions, utilizing a first function for precise positioning within the chamber and a second function to counteract atmospheric pressure, allowing high-temperature degassing without the need for piezoelectric elements or motors inside the vacuum chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If piezoelectric elements or motors are placed inside the vacuum chamber for position adjustment, then positioning accuracy is improved, but temperature restrictions occur during degassing processes
Solution Approach 1:
The moving mechanism is extracted from the vacuum chamber interior and placed on the exterior. The charged particle source support member is moved in the Z direction from outside the vacuum chamber, separating the actuation mechanism from the vacuum environment. This allows high-temperature degassing without temperature restrictions on motors or piezoelectric elements.
Solution Approach 2:
The moving mechanism is divided into two independent functional parts: (1) a first function for moving the support member in X, Y, and Z directions with positioning accuracy, and (2) a second function for moving the support member in the Z direction from outside the vacuum chamber. This segmentation allows each function to be optimized independently, with the second function enabling high-temperature operation.
2Temperature
If the charged particle source is moved from outside the vacuum chamber, then high-temperature degassing is enabled, but positioning precision may be affected
Solution Approach 1:
The moving mechanism is divided into two independent functional parts: (1) a first function for moving the support member in X, Y, and Z directions with positioning accuracy, and (2) a second function for moving the support member in the Z direction from outside the vacuum chamber. This segmentation allows each function to be optimized independently, with the second function enabling high-temperature operation.
Solution Approach 2:
The charged particle source support member acts as an intermediary that can be moved from outside the vacuum chamber while maintaining precise positioning capability. This intermediary structure allows the external moving mechanism to control the source position without being directly exposed to vacuum constraints.
3Temperature
If atmospheric pressure is present outside the vacuum chamber, then high-temperature degassing is possible, but force counteraction is required for Z direction movement
Solution Approach 1:
The moving mechanism on the outside of the vacuum chamber is designed to counteract the atmospheric pressure force acting on the charged particle source support member during Z direction movement. This counterbalancing allows the support member to be moved despite the pressure differential, enabling high-temperature degassing operations.
4Measurement precision
If the charged particle source support member is moved in multiple directions, then position adjustment is improved, but device complexity increases
Solution Approach 1:
The moving mechanism is divided into two independent functional parts: (1) a first function for moving the support member in X, Y, and Z directions with positioning accuracy, and (2) a second function for moving the support member in the Z direction from outside the vacuum chamber. This segmentation allows each function to be optimized independently.
Solution Approach 2:
The moving mechanism is designed with multi-functionality to perform both positioning in three dimensions and high-temperature degassing operations. By integrating these functions into a unified external mechanism, the system achieves versatile operation without proportionally increasing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables precise and accurate positioning of the charged particle source, maintaining high vacuum integrity and allowing for effective degassing, thus ensuring optimal beam alignment and resolution without temperature restrictions.
Implementation Method 1
The focusing lens focuses charged particles by an electric field or a magnetic field
Implementation Method 2
The focusing lens focuses charged particles by an electric field or a magnetic field
Data Source
AI summary
A charged particle beam apparatus includes: a charged particle source support member that directly or indirectly supports a charged particle source; and a moving mechanism configured to move the charged particle source support member. The moving mechanism has a first function of, with a travel direction of a charged particle emitted from the charged particle source defined as a Z direction, a direction perpendicular to the Z direction defined as an X direction, and a direction perpendicular to the Z direction and the X direction defined as a Y direction, moving the charged particle source support member in the X direction, the Y direction, and the Z direction, and a second function of moving the charged particle source support member in the Z direction from an outside of a vacuum chamber, separately from the first function.