Extraction Electrode Arms for Ion Implanters
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Solution Overview
Problem
Conventional extraction electrode assemblies in ion implanters experience instability and sinusoidal variations in ion doping due to rotational speeds of process disks, leading to inconsistent ion implantation processes.
Innovation Solution
The design of extraction electrode arms with specific geometric configurations, including shank portions and end portions, provides stability to the extraction aperture and alters the natural resonance frequency of the extraction electrode assembly, reducing sinusoidal variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional extraction electrode assemblies are used, then the structure is simple, but instability and sinusoidal variations occur in ion doping due to process disk rotation
Solution Approach 1:
The extraction electrode arm is divided into multiple distinct portions: a base portion, a shank portion with varying thickness, and an end portion. This segmentation allows each portion to be optimized independently for stability while managing structural complexity through functional division.
Solution Approach 2:
The shank portion features non-uniform thickness that varies along its length, with different thicknesses at different locations. This local variation in geometry provides enhanced stability at critical regions while maintaining overall structural efficiency, directly addressing the sinusoidal variation problem.
2Reliability
If the extraction electrode arm has uniform thickness, then manufacturing is easy, but sinusoidal variations in ion doping occur due to resonance at process disk rotational speeds
Solution Approach 1:
The shank portion is designed with varying thickness along its length, creating different local stiffness and resonance characteristics. This non-uniform geometry shifts the natural resonance frequency away from process disk rotational speeds, eliminating sinusoidal variations in ion doping while remaining manufacturable.
Solution Approach 2:
The thickness parameter of the shank portion is deliberately varied along its length rather than kept uniform. This parameter change modifies the natural resonance frequency of the extraction electrode arm, preventing resonance at problematic rotational speeds and ensuring consistent ion implantation.
3Stability of the object's composition
If the extraction electrode assembly is rigid, then stability is improved, but the natural resonance frequency may coincide with process disk rotational speeds causing sinusoidal variations
Solution Approach 1:
The natural resonance frequency of the extraction electrode arm is modified by varying the thickness of the shank portion along its length. This parameter change shifts the resonance frequency away from process disk rotational speeds, preventing sinusoidal variations while maintaining extraction aperture stability through the overall rigid structure.
Data Source
AI summary
An extraction electrode arm includes first and second ends spaced apart along a longitudinal axis and first and second sides spaced apart along a lateral axis. The arm also includes first and second surfaces apart, extending longitudinally between the first and second ends and laterally between the first and second sides. The arm further includes a base portion extending from the first end toward the second end and extending between the first and second sides, an end portion longitudinally spaced apart from the base portion and extending to the second end, and a diagonal shank portion extending between the base portion and the end portion and extending laterally from a first diagonal surface region on the first side to a second diagonal surface region on the second side. The diagonal shank portion has a shank thickness that extends laterally between the first and second diagonal surface regions.