Extraction Electrode Alignment via Centering Fixture

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Solution Overview

Problem

Existing extraction electrodes for ion implanters require complex alignment procedures and numerous parts, leading to increased weight, reduced lifespan, and inefficiencies in ion beam alignment and assembly.

Innovation Solution

A compact extraction electrode design comprising a pair of sub-assemblies with semi-circular suppression and ground plates, insulating assemblies, and a shield, which reduces the number of parts and incorporates a centering fixture extension for improved alignment and assembly, featuring a minimalist construction with ceramic and stainless steel components to minimize weight and enhance durability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional extraction electrode design with multiple separate components is used, then alignment precision can be maintained, but device complexity and weight increase

Engineering Contradiction:

Improveion beam alignment precisionVSAvoidnumber of parts

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple separate components (suppression plate, ground plate, insulating assemblies, and alignment features) into an integrated extraction electrode assembly. The suppression plate and ground plate are positioned relative to each other with built-in alignment features, eliminating the need for separate alignment tools and reducing the number of parts while maintaining alignment precision.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The extraction electrode assembly serves multiple functions simultaneously: it provides electrical suppression, establishes ground reference, maintains precise alignment, and enables easy installation/removal. The integrated design allows a single component to perform what previously required multiple separate components working together.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Reliability

If traditional extraction electrode design with numerous components is used, then functional requirements are met, but weight increases

Engineering Contradiction:

Improvefunctional performanceVSAvoidextraction electrode weight

Core Design Contradiction:

ReliabilityVSWeight of moving object

Solution Approach 1:

By merging multiple functional components into a single integrated assembly, the total weight of the extraction electrode is reduced while maintaining all necessary functions. The combined structure eliminates redundant materials and simplifies the overall mass without compromising suppression, grounding, or alignment capabilities.

Inventive Principle:

Principle #5Merging (Combining)

3Manufacturing precision

If complex alignment procedures are used, then electrode positioning accuracy is achieved, but assembly time increases

Engineering Contradiction:

Improveelectrode positioning accuracyVSAvoidassembly time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The alignment features are pre-integrated into the extraction electrode assembly during manufacturing, so that alignment is automatically achieved upon installation. The suppression plate and ground plate include built-in positioning elements that guide correct placement without requiring complex alignment procedures during assembly.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The extraction electrode is divided into distinct functional segments (suppression plate, ground plate, insulating assemblies) that are designed to fit together with predetermined alignment features. This segmentation allows each component to be manufactured independently with built-in alignment references, simplifying the overall assembly process.

Inventive Principle:

Principle #1Segmentation

4Power

If traditional extraction electrode design is used, then ion beam acceleration is achieved, but lifespan is reduced due to erosion

Engineering Contradiction:

Improveion beam acceleration capabilityVSAvoidextraction electrode lifespan

Core Design Contradiction:

PowerVSDuration of action of stationary object

Solution Approach 1:

The patent addresses erosion by designing the suppression plate and ground plate with configurations that distribute electrical stress and ion bombardment more evenly. The integrated assembly includes features that protect critical surfaces from erosion while maintaining the high electric fields necessary for ion beam acceleration, thereby extending component lifespan.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design results in a lightweight, long-lasting extraction electrode with simplified assembly and improved ion beam alignment, reducing the complexity and weight of the ion implanter system while maintaining performance.

Implementation Method 1

insulating assemblies between the suppression plate and ground plate

Methodology Applied

Scientific EffectElectrical insulation: Dielectric

Implementation Method 2

The ions are accelerated along a beam path by an electric field generated by an energized extraction electrode

Methodology Applied

Scientific EffectElectric field: Electric Field

Data Source

PatentUS9793094B2Extraction electrode

Publication Date: 2017.10.17 ION TECHNOLOGY SOLUTIONS LLC

AI summary

The extraction electrode has a pair of sub-assemblies that define a gap. Each sub-assembly has a suppression plate and ground plate secured together in spaced relation by pairs of insulating assemblies. A plate assembly extends perpendicularly from the ground plate. The gap between the subassemblies is set by tabs on a centering fixture extension.