Extractor Chamber Exhaust Layout for Low-Leakage Substrate Processing
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in minimizing gas leakage and the subsequent need for extensive gas pumping, which can be costly and inefficient.
Innovation Solution
The apparatus incorporates a process tube with a heater, a flange for access, a wafer boat support, and a dual exhaust system comprising a first exhaust duct connected to the process chamber and a surrounding extractor chamber with a second exhaust duct, along with a gas injection tube and production unit in the extractor chamber to prevent gas leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a closed cabinet with extractor hood is used to prevent gas leakage, then gas leakage prevention is improved, but the amount of gas that needs to be pumped away increases
Solution Approach 1:
The patent extracts the exhaust duct from the main process chamber and routes it through a separate extractor chamber that is connected to the vacuum pump. This separation allows the exhaust gases to be removed through a dedicated pathway, reducing the overall gas pumping requirements while maintaining effective gas leakage prevention.
Solution Approach 2:
The extractor chamber acts as an intermediary between the process chamber and the vacuum pump. It provides a controlled environment for gas extraction, allowing gases to be removed efficiently without requiring the entire cabinet to be pumped down, thus reducing energy consumption while maintaining safety.
2Object-affected harmful factors
If extensive gas pumping is used to prevent gas leakage, then gas leakage prevention is improved, but operational costs increase
Solution Approach 1:
By extracting the exhaust duct through a separate extractor chamber, the system removes only the necessary amount of gas required for safe operation, rather than pumping away large volumes of gas. This selective extraction reduces gas consumption while maintaining effective leakage prevention.
Solution Approach 2:
The system efficiently discards only the minimal amount of gas necessary for safe operation through the extractor chamber, rather than wasting large quantities of gas through extensive pumping. This approach reduces operational costs while maintaining safety standards.
3Productivity
If the exhaust duct is directly connected to the process chamber, then gas removal efficiency is improved, but gas leakage into the cabinet increases
Solution Approach 1:
The extractor chamber serves as an intermediary between the process chamber and the exhaust system. It maintains a controlled environment that prevents gas leakage into the cabinet while efficiently removing exhaust gases through the connected vacuum pump system.
Solution Approach 2:
The exhaust duct is nested within the extractor chamber, creating a hierarchical structure where the extractor chamber provides an additional containment layer. This nested configuration ensures that gases are contained and efficiently removed without leaking into the main cabinet space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively reduces the amount of gas that needs to be pumped away, enhances processing efficiency, allows for a larger process chamber, and maintains atmospheric pressure, thereby improving economic viability and safety.
Implementation Method 1
a heater surrounding the process tube for heating the process chamber
Implementation Method 2
an exhaust operably connected to the process chamber to remove gas from the process chamber
Data Source
Figure 1
AI summary
An apparatus 1 for processing a plurality of substrates 3 is provided. The apparatus may have a process tube 5 creating a process chamber 7; a heater 9 surrounding the process tube 5; a flange 11 for supporting the process tube; and a door 15 configured to support a wafer boat 17 with a plurality of substrates 3 in the process chamber and to seal the process chamber 7. An exhaust operably connected to the process chamber 7 may be provided to remove gas from the process chamber via a first exhaust duct 19. The apparatus may be provided with an extractor chamber 21 surrounding the first exhaust duct where it connects to the process chamber and connected to a second exhaust duct 23 to remove gas from the extractor chamber.