Semiconductor Equipment Module Positioning With Pre-Set Pedestal Stops
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Solution Overview
Problem
Positioning high mass equipment modules in semiconductor fabrication plants with sufficient accuracy is challenging, especially in limited spaces, due to the bulkiness and weight of the modules and surrounding equipment.
Innovation Solution
A semiconductor processing system and method that utilize a pedestal with positionable stops in a horizontal plane defined by X and Y directions, allowing equipment modules to be moved and fixed relative to reference elements, using stop surfaces for accurate alignment and positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high mass equipment modules are manually positioned in the room, then the equipment modules can be placed on the pedestal, but the positioning accuracy is insufficient
Solution Approach 1:
Stops are pre-positioned on the pedestal at predetermined locations before the equipment module is moved into place. This preliminary positioning of reference elements enables accurate placement of the heavy equipment module without requiring manual measurement and adjustment during the positioning process.
Solution Approach 2:
Stops serve as intermediary reference elements between the pedestal and the equipment module. These stops provide fixed reference surfaces that mediate the positioning process, allowing the heavy equipment module to be accurately positioned relative to the pedestal through abutment against the stops rather than through direct measurement.
2Area of stationary object
If the space around the semiconductor processing system is limited, then the assembly can be performed in a compact area, but the positioning becomes more difficult
Solution Approach 1:
The equipment module positions itself by being moved until its stop surfaces abut against the pre-positioned stops on the pedestal. This self-positioning mechanism eliminates the need for external measurement and adjustment operations, making the positioning process easier to perform even in limited spaces where manual operation would be difficult.
Data Source
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AI summary
A semiconductor processing system and a method for assembling such a system in a room of a semiconductor fabrication plant. The system comprises an equipment module and a pedestal. The equipment module may be movable over the pedestal to bring the equipment module in an end position and may have a plurality of stop surfaces. The method comprises placing the pedestal in the room, placing two stops on the pedestal and positioning the two stops relative to reference elements in the room, and connecting the positioned stops to the pedestal so that the positions thereof in the X-direction and Y-direction are fixed. The equipment module may be moved over the pedestal until the stop surfaces of the equipment module abut against the stops so as to position the equipment module in the X-direction and Y-direction relative to the reference elements.