Fabrication Logistics Rail Network for Vehicle Congestion
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Solution Overview
Problem
Congestion occurs in fabrication facilities due to transport vehicles stopping to load and unload articles at stocker equipment, leading to delays and decreased production efficiency in semiconductor or display fabrication processes.
Innovation Solution
A logistics system with a central rail and branch rail configuration, where the branch rail is formed along the periphery of the load port opposite to the central passage, allowing transport vehicles to load and unload articles without blocking the central passage, and featuring multiple lines in both horizontal and vertical directions to manage high traffic volumes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If transport vehicles stop at stocker equipment located near the central passage to load and unload articles, then article transport function is achieved, but congestion occurs on the central passage reducing transport efficiency
Solution Approach 1:
The load port is extracted from the central passage area and relocated to the periphery. The branch rail is extended to the periphery to provide access to the load port, allowing transport vehicles to complete loading and unloading operations away from the central passage, thus eliminating the congestion problem while maintaining the article transfer function
Solution Approach 2:
The rail system transitions from a single central linear structure to a two-dimensional network including both the central rail and peripheral branch rail. This spatial expansion allows vehicles to access the load port through the branch rail without blocking the central passage, resolving the contradiction between operational access and transport efficiency
2Productivity
If multiple transport vehicles operate simultaneously to increase production efficiency, then article transport capacity increases, but congestion and delays occur in specific sections
Solution Approach 1:
The rail system is segmented into the central rail for through-transport and the branch rail for loading/unloading operations. This segmentation allows multiple vehicles to operate simultaneously on different segments - vehicles can travel through the central passage while others perform operations at the peripheral load port, eliminating mutual interference and reducing delays
Solution Approach 2:
The branch rail acts as an intermediary structure that mediates between the central passage and the load port. It provides a dedicated access path for vehicles needing to load or unload articles, preventing these operations from directly blocking the central passage and enabling smoother traffic flow for all vehicles
Data Source
AI summary
An embodiment of the present disclosure aims to provide a logistics system capable of preventing congestion of transport vehicles in a specific section of a fabrication facility. According to the present disclosure, a logistics system in a fabrication facility includes a stocker equipment that is located near a central passage and stores an article, and a rail that provides a travel path of a transport vehicle that loads and unloads the article to the stocker equipment. The stocker equipment includes a load port disposed on a side opposite to the central passage and a rack that provides a space for storing the article. The rail includes a central rail formed along the central passage and a branch rail that is branched from the central passage and formed along the periphery of the load port.