Fabry-Perot Cavity Array via 2D Step Assembly
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Solution Overview
Problem
Existing Fabry-Perot cavity arrays have complex structures that are difficult to process, limiting their miniaturization and increasing production costs due to the need for hundreds of cavities with varying thicknesses, which is challenging with current nano-fabrication technologies like photolithography and electron beam etching.
Innovation Solution
A Fabry-Perot cavity array is formed by fitting two elements with two-dimensional step structures, where the step height change directions differ, allowing for a simple and easily processed three-dimensional structure, enabling the creation of arrays with hundreds of cavities using methods like gray-scale lithography and additive manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If nano-fabrication technology such as photolithography and electron beam etching is used to process Fabry-Perot cavity array, then the cavities can be manufactured, but the complex three-dimensional structure with hundreds of cavities of varying thicknesses is difficult to realize and process
Solution Approach 1:
The patent divides the Fabry-Perot cavity array into multiple independent elements, each with a simplified two-dimensional step structure. These elements are then assembled to form the complete three-dimensional cavity array, reducing the processing complexity of each individual element while maintaining the overall functional complexity
Solution Approach 2:
The patent transitions from processing a complex three-dimensional structure directly to using two-dimensional step structures that can be easily fabricated. By arranging these two-dimensional elements in specific configurations, the three-dimensional cavity array is constructed through assembly rather than direct fabrication
2Measurement precision
If a Fabry-Perot cavity array with hundreds of cavities of varying thicknesses is constructed, then high-resolution spectrum detection is achieved, but production costs increase and miniaturization becomes difficult
Solution Approach 1:
The cavity array is segmented into multiple elements with standardized two-dimensional step structures. This segmentation allows for simplified manufacturing of each element using cost-effective processes, while the assembly of these elements creates the functional complexity needed for high-resolution spectrum detection
Solution Approach 2:
The patent uses parameter changes in the step heights of the two-dimensional structures to create the varying cavity thicknesses needed for different spectral responses. This approach maintains manufacturing simplicity while achieving the spectral resolution requirements through controlled parameter variation rather than complex geometry
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the processing and reduces production costs, enabling the creation of high-resolution spectrum detectors with a wide spectrum detection range, suitable for miniaturization and integration into portable devices.
Implementation Method 1
a step surface of the first step and a step surface of the second step are plated with a reflective film
Implementation Method 2
Fabry-Perot cavity array including: a first element having a first step and a second element having a second step
Data Source
AI summary
A Fabry-Perot cavity array and a spectrum detector, where the Fabry-Perot cavity array includes a first element having a first step and a second element having a second step, the first step and the second step are a two-dimensional step structure; a first step side of the first element is arranged opposite to a second step side of the second element, and a step height change direction of the first step is different from a step height change direction of the second step; a step surface of the first step and a step surface of the second step are plated with a reflective film. By fitting two elements having a two-dimensional step structure, a Fabry-Perot cavity array having a three-dimensional step structure is formed, and it is simple in structure and easy to be processed and implemented.