Fabry-Perot Interferometer With Absorbing Layer for IR Detection

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Solution Overview

Problem

Existing micromechanical Fabry-Perot interferometers require complex integration of sensors for infrared detection, complicating the manufacturing process.

Innovation Solution

An interferometer design featuring a partly transparent substrate, an absorbing reflector layer, and an actuator to adjust the gap between the reflector and the absorbing reflector layer, which absorbs electromagnetic radiation and determines its temperature to detect infrared light without a separate detector.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a separate infrared sensor is integrated into the interferometer, then infrared detection capability is achieved, but the manufacturing process becomes complicated

Engineering Contradiction:
Improveinfrared detection capabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent merges the detector functionality directly into the interferometer structure by using the bottom surface of the substrate as the detection surface. The substrate itself serves dual purposes: as the interferometer base and as the detector, eliminating the need for separate sensor integration and simplifying manufacturing.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The substrate is designed to perform multiple functions simultaneously: it acts as the structural base of the interferometer, supports the reflector, and serves as the infrared detector. This multi-functionality reduces component count and manufacturing complexity while maintaining detection capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If the optical cavity gap is fixed, then the structure is simpler, but the measured wavelength cannot be adjusted

Engineering Contradiction:
Improvewavelength adjustment capabilityVSAvoidstructure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent introduces a movable reflector that can adjust its position relative to the fixed bottom reflector, dynamically changing the optical cavity gap. This allows wavelength tuning while maintaining a relatively simple overall structure, as only one component needs to be movable.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The movable reflector acts as an intermediary element between the fixed substrate and the incoming light, enabling wavelength adjustment by changing its position. This mediator approach allows flexible wavelength selection without requiring complex reconfiguration of the entire interferometer structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design allows for simplified construction and the ability to detect multiple wavelengths by adjusting the gap, eliminating the need for a separate detector and enhancing detection capabilities.

Implementation Method 1

the absorbing reflector layer configured to absorb at least some wavelengths of the electromagnetic radiation

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

The light that enters the optical cavity can undergo multiple reflections between the first and the second mirrors before it is transmitted out of the cavity. A wavelength at which constructive interference occurs is transmitted through the first mirror

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentUS12607509B2Interferometer with absorbing layer
Publication Date: 2026.04.21 MURATA MFG CO LTD
  • US12607509B2 patent drawing
  • US12607509B2 patent drawing
  • US12607509B2 patent drawing

AI summary

A micromechanical Fabry-Perot interferometer is provided that includes an at least partly transparent substrate; an illuminated area where the light is passed through the substrate; a reflector on the top surface of the substrate in the illuminated area; an absorbing reflector layer above the reflector in the illuminated area, which absorbs at least some wavelengths of the infrared light; an arrangement for determining the temperature of the absorbing reflector layer; and at least one actuator to adjust the gap between the reflector and the absorbing reflector layer.