Fabry-Perot Sensor Phase Evolution Detection

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Solution Overview

Problem

Existing optical sensor systems face challenges in achieving precise measurements of physical quantities such as vibration, strain, temperature, and pressure due to limitations in detecting phase evolution and periodicity in spectral responses.

Innovation Solution

An optical sensor system comprising a Fabry-Perot structure with two reflective surfaces, where a spectral acquisition arrangement acquires successive spectral responses and a spectral analysis arrangement detects periodicity and phase evolution to provide precise measurements of optical path length variations, enabling accurate measurement of physical quantities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional peak shift-based methods are used to measure optical path length variations, then the measurement process is relatively simple, but the measurement precision is insufficient to achieve sub-nanometer accuracy

Engineering Contradiction:
Improveoptical path length measurement precisionVSAvoidspectral analysis complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by performing a Fourier transform on the spectral response before analyzing peak shifts. This transforms the spectral data into the frequency domain, where periodic components can be identified and analyzed more precisely. The phase information extracted from the Fourier transform provides sub-nanometer measurement precision that cannot be achieved by direct peak shift analysis alone.

Inventive Principle:
Principle #10Preliminary action

2Measurement precision

If spectral responses are analyzed without detecting periodicity and phase evolution, then the analysis process is faster, but the measurement accuracy of physical quantities is insufficient

Engineering Contradiction:
Improvephysical quantity measurement accuracyVSAvoidspectral analysis time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent utilizes periodic action by detecting the periodicity in the spectral response through Fourier transform. The spectral response contains periodic components that correspond to the optical path length variations. By identifying and analyzing these periodic components and their phase evolution, the system achieves high measurement accuracy while efficiently processing the spectral data.

Inventive Principle:
Principle #19Periodic action

3Loss of information

If only peak shift information is used from spectral responses, then the data processing is simpler, but important phase evolution information is lost

Engineering Contradiction:
Improvephase evolution information retentionVSAvoidspectral analysis arrangement complexity
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The patent applies dimensionality change by transitioning from analyzing only the amplitude/position dimension (peak shift) to analyzing both the frequency and phase dimensions through Fourier transform. This additional phase dimension provides critical information about optical path length variations that cannot be obtained from peak shift analysis alone, enabling sub-nanometer measurement precision without excessive complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves sub-nanometer precision in measuring optical path length variations, significantly improving the accuracy of physical quantity measurements compared to traditional peak shift-based methods.

Implementation Method 1

Interference occurs due to multiple superpositions of both reflected and transmitted beams at two parallel surfaces

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 2

A Fabry-Perot structure comprises two reflective surfaces spaced apart a distance from each other

Methodology Applied
Scientific EffectFabry-Perot interferometer: Fabry-Perot Interferometer

Data Source

PatentUS10488255B2Optical sensor system with spectral analysis arrangement detecting a periodicity in a spectral response of a fabry-perot structure
Publication Date: 2019.11.26 OPTICS11
  • US10488255B2 patent drawing
  • US10488255B2 patent drawing
  • US10488255B2 patent drawing

AI summary

An optical sensor system includes an optical sensor arrangement that includes a Fabry-Perot structure having two reflective surfaces spaced apart at a distance from each other. A spectral acquisition arrangement acquires successive spectral responses from the optical sensor arrangement during successive time intervals. A spectral analysis arrangement detects a periodicity in at least one of the successive spectral responses that have been acquired. The spectral analysis arrangement further detects a phase evolution of the periodicity throughout the successive spectral responses. The phase evolution of the periodicity provides a relatively precise measurement of a variation in an optical path length between the two reflective surfaces of the Fabry-Perot structure. A variation in a physical quantity can cause the variation in the optical path length. Accordingly, a relatively precise measurement of the physical quantity can be achieved.