Fiber-Optic Fabry-Perot Sensor Batch Preparation
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Solution Overview
Problem
Traditional piezoresistive and piezoelectric pressure sensors face challenges in high-temperature environments due to material limitations and thermal expansion issues, while fiber-optic Fabry-Perot sensors suffer from inconsistency and high production costs in batch manufacturing.
Innovation Solution
A batch preparation method for fiber-optic Fabry-Perot pressure sensors using high-temperature thermal compression bonding and micromachining techniques, with CO2 laser fusion for glue-free sealing, to improve consistency and material uniformity, particularly utilizing fused quartz glass with low thermal expansion coefficients.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If chemical corrosion technology, arc discharging technology or laser processing technology is used to manufacture fiber-optic Fabry-Perot pressure sensors, then the sensors can be produced, but the consistency of sensing units is poor and batch manufacture is difficult
Solution Approach 1:
The patent replaces chemical corrosion technology, arc discharging technology, and laser processing technology with MEMS (Micro-Electro-Mechanical Systems) technology for manufacturing the sensing units. This substitution enables precise control of diaphragm thickness and effective radius through photolithography and etching processes, achieving high consistency across multiple sensing units while enabling batch manufacture on silicon wafers.
Solution Approach 2:
The patent systematically controls and optimizes key manufacturing parameters including diaphragm thickness (5-50 μm), effective radius (50-200 μm), and cavity volume (10-1000 μL) through MEMS processing. By precisely controlling these parameters during batch fabrication, the patent achieves high consistency in sensing unit performance while maintaining scalability for mass production.
2Productivity
If Pyrex glass wafer and silicon wafer are used for batch manufacture of fiber-optic Fabry-Perot pressure sensors, then batch manufacture is achieved, but the sensors cannot achieve pressure measurement in higher-temperature environment due to material thermal expansion mismatch
Solution Approach 1:
The patent uses homogeneous quartz glass material for both the sensing unit diaphragm and the sealing structure, ensuring matching thermal expansion coefficients. This homogeneity eliminates thermal stress and deformation at high temperatures, enabling the sensor to operate stably in environments up to 1200°C while maintaining batch manufacture capability through MEMS processing on quartz wafers.
Solution Approach 2:
The patent employs composite material structure combining quartz glass sensing unit with quartz glass sealing housing, creating a thermally compatible composite system. The use of quartz glass throughout the structure provides excellent high-temperature resistance and thermal stability, allowing batch-manufactured sensors to operate in higher-temperature environments compared to Pyrex glass or silicon-based designs.
3Ease of manufacture
If ultraviolet epoxy resin or high-temperature-resistant adhesive is used to connect fiber-optic and sensing unit, then the connection is achieved, but the stability and service life of the sensor at high temperature is reduced due to binding material degradation
Solution Approach 1:
The patent removes the adhesive layer entirely from the connection between the sensing unit and the fiber-optic assembly. By eliminating the binding material, the patent avoids the high-temperature degradation issues associated with epoxy resin and adhesive, achieving direct mechanical and optical coupling that maintains stability and reliability in high-temperature environments up to 1200°C.
Solution Approach 2:
The patent introduces a metal ferrule as an intermediary component to connect the fiber-optic to the sensing unit. The ferrule provides a stable mechanical interface and precise alignment structure without requiring high-temperature adhesive, enabling reliable connection that withstands high-temperature operation while simplifying the assembly process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables the production of consistent, high-temperature-resistant fiber-optic Fabry-Perot pressure sensors with improved stability and extended operational range, facilitating low-cost batch manufacturing and enhanced performance in high-temperature environments.
Implementation Method 1
the glue-free sealing integration of a full-quartz sensing unit and a signal transmission fiber-optic of the sensor is achieved by using a CO2 laser fusion technology
Implementation Method 2
A fiber-optic Fabry-Perot pressure sensor generally senses a pressure by means of a sensing unit based on an optical principle
Data Source
AI summary
Some embodiments of the disclosure provides a method for preparing a sensing unit of a fiber-optic Fabry-Perot pressure sensor. The method includes the following steps. Preparing a first quartz sheet and a second quartz sheet, polishing the upper surface of the first quartz sheet, and polishing the upper surface of the second quartz sheet. Fabricating a plurality of grooves in the upper surface of the first quartz sheet. Fabricating through holes in the lower surface of the first quartz sheet, each of the through holes being coaxial with a corresponding groove and communicating with the corresponding groove. Combining the upper surface of the second quartz sheet with the upper surface of the first quartz sheet to form a laminated body. Cutting the plurality of grooves of the laminated body to obtain a plurality of sensing units.